Ejector Pin Structure With Segmented Convex Support
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Solution Overview
Problem
In semiconductor manufacturing, the large contact area between ejector pin structures and wafers leads to corrosion during cleaning processes, resulting in particle formation that affects subsequent procedures and reduces wafer yield.
Innovation Solution
An ejector pin structure with a convex structure and an inverted trapezoid-like structure, where the convex structure supports the wafer with a reduced horizontal projection area compared to the inverted trapezoid-like structure, and the end part and ejector rod are detachably connected, facilitating easier replacement and reducing contact area to minimize corrosion and particle formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the contact area between ejector pin structure and wafer is large, then the support stability is improved, but the corrosion resistance deteriorates leading to particle formation
Solution Approach 1:
The ejector pin structure is divided into multiple pins distributed across the wafer back surface, with each pin having a small contact area. This segmentation maintains overall support stability through distributed contact points while minimizing corrosion and particle formation at each individual contact point.
Solution Approach 2:
The ejector pin structure uses a specific geometric design where the horizontal projection area of the convex structure is less than that of the inverted trapezoid-like structure. This creates different local contact qualities: a small convex contact area with the wafer to reduce corrosion, while the larger inverted trapezoid base provides structural stability and support.
2Strength
If the ejector pin structure is integrated, then the structural strength is improved, but the replacement efficiency deteriorates
Solution Approach 1:
The ejector pin structure separates the ejector rod from the end part with a detachable connection. This allows the end part to be replaced independently without replacing the entire ejector pin structure, improving maintenance efficiency while the ejector rod maintains structural strength.
Solution Approach 2:
The end part is extracted as a separate replaceable component from the ejector rod. This extraction allows the critical wear-prone end part to be replaced independently, improving productivity by avoiding replacement of the entire integrated structure while the ejector rod retains its structural integrity.
Data Source
AI summary
An ejector pin structure at least includes an end part and an ejector rod. The end part includes a convex structure and an inverted trapezoid-like structure located below the convex structure. The convex structure is configured to support an object to be processed. A projection area of the convex structure in a horizontal plane is less than a projection area of the inverted trapezoid-like structure in the horizontal plane.