EL Display Substrate Vacuum-to-Atmosphere Transition
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Solution Overview
Problem
Current methods for manufacturing large-size organic EL light-emitting elements face challenges in reducing costs and defect rates, particularly in transitioning substrates from vacuum to atmospheric pressure during the manufacturing process, which can lead to adhesion issues and decreased yields.
Innovation Solution
A method involving a two-stage gas introduction process in a load lock chamber, where the substrate is gradually transitioned from a high vacuum to a lower vacuum and then to atmospheric pressure, with the first intake period being longer than the second, to prevent water adhesion and optimize the manufacturing environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is rapidly transitioned from vacuum to atmospheric pressure, then the manufacturing process time is reduced, but water adhesion occurs on the substrate surface causing defects
Solution Approach 1:
The atmosphere transition process is divided into two distinct stages: a first intake period for initial gas introduction and a second intake period for completing the transition. This segmentation allows control over the transition rate at different phases, preventing water adhesion while maintaining reasonable process time.
Solution Approach 2:
The first intake period serves as a preliminary action where gas is gradually introduced to prepare the atmosphere transition before the second, more rapid intake period. This preliminary gradual introduction prevents immediate water adhesion that would occur with direct rapid pressurization.
2Manufacturing precision
If the first intake period is extended to prevent water adhesion, then substrate surface quality is maintained, but the total manufacturing process time increases
Solution Approach 1:
The gas introduction rate is made dynamic rather than static. The first intake period uses a slower rate to prevent water adhesion, while the second intake period increases the rate to complete the transition efficiently. This dynamic adjustment optimizes both surface quality and process time.
Solution Approach 2:
The gas introduction is performed in periodic stages with different rates. The first period uses a conservative slow rate for safety, followed by a second period with a faster rate for efficiency. This periodic action with varying intensities resolves the time-quality tradeoff.
Data Source
AI summary
A method of manufacturing an EL display device having a panel part is such that a constituent element of the panel part is formed through film formation in a vacuum atmosphere. After the constituent element of the panel part has been formed on a substrate in the vacuum atmosphere, the post-film-formation substrate is placed on standby during transporting the substrate from a place in the vacuum atmosphere to a place in an atmospheric-pressure atmosphere. The placing the substrate on standby includes a first intake period and a second intake period. During the first intake period, an intake gas is gradually introduced to change the atmosphere, from the first vacuum atmosphere to the second vacuum atmosphere that exhibits a lower degree of vacuum than that of the first vacuum atmosphere. During the second intake period, the intake gas is introduced to change the atmosphere, from the second vacuum atmosphere to the atmospheric-pressure atmosphere. The first period is set to be longer in time than the second period.