Elastic Conductive Intermediate Connecting Member for Inspection Alignment
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Solution Overview
Problem
Existing inspection apparatuses for substrates require complex interfaces and precise alignment of multiple components, which complicates the inspection process and increases the need for accurate positioning, thereby increasing the complexity and cost of the inspection units.
Innovation Solution
An intermediate connecting member with elastic, conductive connection parts and a retainer simplifies the interface by electrically connecting terminals on a probe card to a tester motherboard, eliminating the need for precise alignment of the substrate to the probe card, and allowing for a more straightforward integration of the inspection unit components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple inspection units share a transport robot or mobile stage, then productivity is improved by allowing parallel inspection operations, but device complexity increases due to the need for precise alignment and complex interfaces between components
Solution Approach 1:
An intermediate connecting member is introduced between the probe card and the tester motherboard. This connecting member includes multiple connection parts with elastic members that have electrically conductive surfaces, serving as a mediator to simplify the interface between the first member (probe card with first terminals) and the second member (tester motherboard with second terminals).
Solution Approach 2:
The connection parts utilize elastic members with electrically conductive surfaces, changing the physical state from rigid to elastic. This allows the connection parts to deform and automatically align with the terminals, eliminating the need for precise alignment while maintaining electrical connectivity.
2Measurement precision
If precise alignment of substrate to probe card is required, then measurement precision is improved, but ease of operation deteriorates due to the need for accurate positioning and alignment mechanisms
Solution Approach 1:
The connection parts are designed with elastic members that can dynamically deform to accommodate misalignment. The elastic nature allows the connection parts to adapt to positional variations, maintaining reliable electrical contact without requiring precise static alignment between the substrate and probe card.
Solution Approach 2:
By changing the connection parts from rigid to elastic with conductive surfaces, the system gains tolerance to positional variations. The elastic deformation allows the connection parts to self-align with the terminals, eliminating the need for complex positioning mechanisms while maintaining measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the inspection unit structure, reduces the need for precise alignment, and lowers the complexity and cost by using an intermediate connecting member with elastic, conductive connection parts to connect terminals, enabling efficient electrical testing of substrates without requiring an aligner.
Implementation Method 1
Each of the multiple connection parts is formed of an elastic member to which an electrically conductive property is given on at least a surface of the elastic member
Implementation Method 2
an electrically conductive property is given on at least a surface of the elastic member
Data Source
AI summary
An intermediate connecting member according to one aspect of the present disclosure is provided between a first member including multiple first terminals and a second member including multiple second terminals. The intermediate connecting member includes multiple connection parts configured to electrically connect the first terminals to the second terminals, and a retainer holding the multiple connection parts. Each of the multiple connection parts is formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member.