Elastic Pipe Damper Pressure Control for Clean Stable Airflow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional flow control systems in substrate treating apparatuses face challenges in accurately adjusting airflow due to empty spaces and accumulation of process by-products in dampers, which hinders precise pressure control and requires dismantling for cleaning.
Innovation Solution
A flow control system with a damper as an elastic, spherical body and a pressure control unit that includes a pressure control pipe, regulator, and controller to adjust the opening/closing rate of the pipe and remove accumulated particles by contracting and expanding the damper.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional damper with a rotating plate is used to control gas flow rate, then the flow rate can be adjusted, but empty spaces are formed between the plate and pipe inner wall causing inaccurate airflow control
Solution Approach 1:
The damper is divided into multiple radial segments that can independently rotate around the rotation shaft. This segmentation eliminates empty spaces between the damper and pipe inner wall while maintaining adjustable flow control capability, as each segment can be precisely positioned against the wall.
Solution Approach 2:
The damper segments are designed to be rotatable around the rotation shaft, enabling dynamic adjustment of the opening/closing rate. This dynamic mechanism allows continuous control of gas flow rate from fully open to fully closed positions while maintaining contact with the pipe inner wall for accurate control.
2Ease of operation
If a conventional damper with a rotating plate is used, then flow control is possible, but process by-products accumulate on the plate requiring dismantling for cleaning
Solution Approach 1:
The damper is segmented into multiple independent sections that can be easily separated from each other. This segmentation allows the segments to be removed individually for cleaning without dismantling the entire pipe structure, making maintenance much more convenient while maintaining the functional integrity of the damper.
Solution Approach 2:
The damper segments are designed to be easily removable and replaceable. When process by-products accumulate, the segments can be quickly taken out for cleaning or replacement and then reinstalled, enabling rapid maintenance operations without extensive dismantling work.
3Measurement precision
If the pipe cross-sectional area is reduced to control flow rate, then gas flow rate decreases, but pressure control within the pipe becomes inaccurate
Solution Approach 1:
A pressure sensor is installed within the pipe to detect the internal pressure in real-time. This pressure feedback is transmitted to a controller that automatically adjusts the damper segments' position to maintain the desired pressure level, ensuring accurate pressure control while allowing flexible flow rate adjustment.
Solution Approach 2:
The manual mechanical adjustment of the damper is replaced with an automated control system that uses pressure sensor feedback and electronic control. This substitution enables precise pressure control through automated damper positioning, eliminating the need for manual trial-and-error adjustments and improving both pressure accuracy and flow control efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate pressure control within pipes and convenient removal of process by-products, ensuring consistent airflow and maintaining preset pressures during substrate treatment.
Implementation Method 1
a pressure control unit for supplying a gas into the damper or exhausting an inside of the damper
Implementation Method 2
a damper provided within the pipe for controlling an opening/closing rate of the pipe by a contraction or an expansion; the damper is provided as an elastic body
Data Source
AI summary
The inventive concept provides a flow control system. The flow control system includes a damper provided within the pipe for controlling an opening/closing rate of the pipe by a contraction or an expansion; and a pressure control unit for supplying a gas into the damper or exhausting an inside of the damper, and wherein the pressure control unit includes a pressure control pipe for flowing the gas to/from within the damper through an inlet of the damper.