Elastic Energy Filter Assembly for Ion Implantation Heat Stress
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Solution Overview
Problem
Ion implantation systems face challenges in producing depth profiles with wider depth distributions and mechanical stability due to thermal stress and heating issues in energy filter assemblies, leading to potential membrane damage and reduced wafer throughput.
Innovation Solution
An energy filter assembly with a mechanically decoupled energy filter, utilizing a coupling element such as a micro spring to elastically connect the filter frame with the energy filter, which helps in reducing thermal stress and maintaining mechanical stability by allowing controlled tension and heat management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the energy filter is rigidly connected to the filter frame, then mechanical stability is improved, but thermal stress causes membrane damage and reduces reliability
Solution Approach 1:
The filter assembly is divided into separate components: the filter frame, the energy filter membrane, and elastic coupling elements. This segmentation allows each component to perform its specific function independently while being connected through the coupling elements, which absorb thermal stress and prevent membrane damage.
Solution Approach 2:
The coupling elements are designed with elastic properties that change under thermal stress. These elements can deform elastically to accommodate thermal expansion and contraction, maintaining mechanical stability while protecting the membrane from damage caused by thermal stress.
2Manufacturing precision
If the energy filter membrane thickness is reduced to achieve sharper depth profiles, then manufacturing precision is improved, but mechanical strength decreases and membrane damage risk increases
Solution Approach 1:
The elastic coupling elements are installed beforehand to provide cushioning and protection to the thin membrane. These elements absorb mechanical shocks and thermal stress, preventing membrane damage even when the membrane is made very thin to achieve sharp depth profiles.
Solution Approach 2:
The filter assembly uses a composite structure combining the thin energy filter membrane with the more robust filter frame and elastic coupling elements. This composite design allows the membrane to be extremely thin for precision while the surrounding structure provides mechanical strength and protection.
3Productivity
If the ion beam power is increased to enhance productivity, then wafer throughput is improved, but thermal heating increases and causes membrane damage
Solution Approach 1:
The thermal energy from the high-power ion beam, which would normally be harmful, is converted into a beneficial effect. The elastic coupling elements use this thermal energy to create controlled elastic deformations that actually help distribute and dissipate heat, preventing localized overheating and membrane damage while maintaining high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces thermal stress and mechanical instability, minimizing the risk of membrane damage and enhancing wafer throughput by maintaining controlled tension and efficient heat management during ion implantation processes.
Implementation Method 1
at least one coupling element for elastically connecting a first filter frame with the energy filter
Implementation Method 2
The energy filter has at least one filter element absorbing the beam energy of an ion beam
Data Source
AI summary
An energy filter assembly (1, 100, 200, 300) for ion implantation system is provided comprising an energy filter (25), a first filter frame (40), and at least one coupling element (50). The energy filter (25) has at least one filter element (25a) absorbing the beam energy of an ion beam (10). The at least one coupling element (50) elastically connects the first filter frame (40) with the energy filter (25).