Elastic Engagement Piece for Substrate Storage Container Attachment

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Solution Overview

Problem

Conventional substrate storage containers face issues with poor workability in attaching and detaching transport components due to the lack of elasticity in hooking parts, leading to potential disengagement and difficulties in rinsing and drying, which can result in water residue and corrosion risks for semiconductor wafers.

Innovation Solution

The substrate storage container incorporates an attachment structure with a supporting rail, guide piece, and elastic engagement piece that interferes with a forked portion, allowing for improved attachment and detachment of transport components without requiring strong external forces, while also facilitating fluid circulation to prevent water stagnation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the hooking part is integrally formed with the base of the transport component using high rigidity molding material, then the transport component can securely support the substrate storage container, but the hooking part cannot be deformed easily requiring strong external force for engagement and detachment

Engineering Contradiction:
Improvesupport strengthVSAvoidworkability
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The hooking part is separated from the base as an independent removable component. The base is formed with a hooking part attachment hole, and the hooking part is attached to this hole, allowing the hooking part to be replaced or adjusted independently while maintaining the structural integrity of the base.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The hooking part is formed with elastic material having different physical properties than the rigid base. This parameter change in material elasticity allows the hooking part to be easily deformed for engagement and detachment operations while the base maintains its high rigidity for support functions.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If the hooking part is made with high elasticity to improve workability, then easy engagement and detachment is achieved, but the engagement strength decreases causing the hooking part to come out of the engagement rib

Engineering Contradiction:
ImproveworkabilityVSAvoidengagement strength
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The hooking part uses elastic material with optimized physical parameters that provide sufficient elasticity for easy deformation during engagement and detachment, while maintaining adequate engagement strength through proper material selection and structural design of the engagement rib and hooking part interface.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The hooking part is designed to dynamically deform during engagement and detachment operations, allowing it to flex into the engagement rib position and then maintain a stable engaged state. The elastic material enables this dynamic behavior while preserving reliable engagement.

Inventive Principle:
Principle #15Dynamics

3Reliability

If the attachment structure uses a dead end structure for supporting rails and engagement parts, then the transport component can be securely fixed, but rinsing water remains in the container body causing drying issues and corrosion risks

Engineering Contradiction:
Improvefixation strengthVSAvoidwater residue
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The attachment structure is divided into separate components with gaps between them. The supporting rails and engagement parts are positioned to create channels and openings that allow rinsing water to flow through and drain out, preventing water accumulation while maintaining secure fixation of the transport component.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The harmful factor of water accumulation is eliminated by designing the attachment structure to extract or drain water through gaps and channels. The structure allows water to pass through rather than being trapped, thereby preventing corrosion and drying issues.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the operativity of attaching and detaching transport components, reduces the risk of disengagement, and ensures efficient rinsing and drying, preventing water residue and corrosion risks for semiconductor wafers.

Implementation Method 1

an elastic engagement piece (35) to be guided by the guide piece (23) of the attachment structure, the elastic engagement piece being made to interfere with the forked portion (25)

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS8770410B2Substrate storage container
Publication Date: 2014.07.08 SHIN ETSU POLYMER CO LTD
  • US8770410B2 patent drawing
  • US8770410B2 patent drawing
  • US8770410B2 patent drawing

AI summary

A substrate storage container includes an attachment structure in a container body for storing substrates so that a transport component is removably attached to the attachment structure. The attachment structure includes a supporting rail portion provided on an outer wall of the container body, a guide piece provided on the outer wall of the container body, and an engagement part formed with the guide piece. A forked portion formed of a combination of the guide piece and the engagement part. The transport component includes a hollowed frame-shape main part member supported by the supporting rail portion of the attachment structure.