Elastic Mold for Adjustable Pitch Optical Grating

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Solution Overview

Problem

Conventional nano-imprint techniques require multiple molds for semiconductor devices with specific grating pitches, limiting flexibility and efficiency in pattern replication.

Innovation Solution

A mold made of elastic material is used, allowing for deformation to adjust the pitch of the periodic pattern, enabling the formation of optical gratings and distributed feedback laser diodes with customizable pitches using a single mold by deforming and hardening the resin under controlled conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional rigid mold is used for nano-imprint, then the mold structure is simple and easy to manufacture, but the pitch of the periodic pattern cannot be adjusted for different devices

Engineering Contradiction:
Improvepitch adjustabilityVSAvoidmold structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The mold is designed with a flexible substrate and adjustable support structure that allows dynamic change of the mold's curvature radius. By changing the curvature radius, the pitch of the periodic pattern on the mold surface can be adjusted to match different device requirements, enabling one mold to serve multiple devices with different pitch specifications.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes the physical parameters of the mold system by adjusting the curvature radius of the flexible substrate. This parameter change allows the same mold to produce periodic patterns with different pitches, thereby improving adaptability without requiring multiple different molds.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If multiple molds are prepared for different grating pitches, then each device can have its specific pattern, but the number of molds increases and manufacturing complexity increases

Engineering Contradiction:
Improvegrating pitch precisionVSAvoidnumber of molds
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mold is designed to perform multiple functions by adjusting its curvature radius. A single mold can produce periodic patterns with various pitches by changing the support structure configuration, eliminating the need for multiple specialized molds while maintaining precise pitch control for different device requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

By changing the curvature radius parameter of the flexible substrate, the same mold can accurately produce different pitch specifications. This parameter adjustment capability allows one mold to replace multiple molds, reducing manufacturing complexity while maintaining the precision required for different grating pitches.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If the mold is made of elastic material to allow deformation, then pitch adjustment becomes possible, but controlling excess deformation becomes more difficult

Engineering Contradiction:
Improvepitch variabilityVSAvoidpitch control precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The mold includes a support structure with adjustable support points that provide feedback control for the flexible substrate deformation. By adjusting the position and force of the support points, the curvature radius can be precisely controlled, preventing excess deformation and ensuring accurate pitch formation on the resin surface.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The invention controls the deformation of the elastic mold by precisely adjusting the curvature radius parameter through the support structure. This controlled parameter change ensures that the mold deforms to the exact degree needed for the desired pitch, preventing both insufficient and excessive deformation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for precise control of grating pitches, reducing the need for multiple molds and enhancing the yield of devices with varied grating pitches, making it suitable for applications like CWDM systems.

Implementation Method 1

the resin is an ultraviolet curable resin, and the step to harden the resin may be performed to irradiate the ultraviolet rays through the mold when the mold is transparent to the ultraviolet rays

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Data Source

PatentUS7763484B2Method to form an optical grating and to form a distributed feedback laser diode with the optical grating
Publication Date: 2010.07.27 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US7763484B2 patent drawing
  • US7763484B2 patent drawing
  • US7763484B2 patent drawing

AI summary

A method for forming a grating with an adjustable pitch and a method for forming a DFB-LD with an optical grating whose pitch is adjustable during the process are disclosed. The method of the invention; first prepares a mold with a pattern to form the grating; second, pushes the mold against the resin as deforming the mold; and third, hardens the mold. The resin with a periodic pattern whose pitch is adjustable during the process is available.