Elastic Mounting for Lithography Optical Elements
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Solution Overview
Problem
Existing projection exposure apparatuses for semiconductor lithography face challenges due to temperature fluctuations, which can lead to aberrations and damage to optical elements caused by particle formation from screw ring friction.
Innovation Solution
The apparatus employs an illumination optical unit with optical elements fixed using elastic elements, eliminating the need for screw rings and reducing the risk of particle formation, thereby preventing damage to optical elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If screw rings are used to fix optical elements, then the optical elements can be securely mounted, but particles are generated due to friction between threads which can precipitate on optical elements and cause damage
Solution Approach 1:
The patent removes the screw ring component entirely from the optical element mounting system. Instead of using threaded fasteners, the invention employs alternative mounting mechanisms that eliminate the source of particle-generating friction, thereby solving the contradiction between secure mounting and particle-free operation
Solution Approach 2:
The patent replaces the mechanical screw ring fastening system with a different mounting mechanism that does not rely on threaded friction. This substitution eliminates the harmful particle generation while maintaining the necessary secure mounting of optical elements
2Manufacturing precision
If preheaters are used to compensate for temperature-induced aberrations, then imaging quality can be maintained, but the risk of particle formation and optical element damage increases
Solution Approach 1:
The patent eliminates the source of particles by removing screw rings from the preheater's optical element mounting system. This allows the preheater to continue compensating for temperature-induced aberrations and maintaining imaging quality without the risk of particle formation from thread friction
Solution Approach 2:
The patent introduces alternative mounting mechanisms that act as intermediaries between the preheater housing and optical elements. These intermediaries provide secure mounting while preventing the generation of particles that could damage optical elements, thus mediating between the need for stable mounting and the need for particle-free operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents particle exposure to the illumination optical unit, maintaining the integrity of optical elements and ensuring consistent imaging quality despite temperature fluctuations.
Implementation Method 1
at least one optical element is fixed within the housing by way of at least one elastic element
Implementation Method 2
a heating device for heating at least one element of the projection exposure apparatus by means of electromagnetic radiation
Data Source
AI summary
A projection exposure apparatus has a heating device for heating at least one element of the projection exposure apparatus via electromagnetic radiation. The heating device comprises an illumination optical unit having a housing and at least one optical element, arranged within the housing, for influencing the electromagnetic radiation. The at least one optical element is fixed within the housing by way of at least one elastic element.