Elastic Multi-Contact Probe for Non-Destructive Semiconductor Characterization
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Solution Overview
Problem
Conventional four-point probes are destructive and limited to resistivity measurements, failing to provide accurate insights into semiconductor materials due to high contact resistance and inability to measure other electrical characteristics.
Innovation Solution
An elastic multi-contact probe with conductive elastomer strips and dielectric strips, allowing for non-destructive measurement of sheet resistance and contact resistivity through current-voltage curve analysis, using a combination of conductive and dielectric materials for improved contact and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional four-point probes with sharp metal tips are used, then resistivity measurement capability is provided, but the measurement becomes destructive and inaccurate due to high contact resistance
Solution Approach 1:
The patent changes the fundamental parameter of probe tip geometry from sharp points to flat surfaces, and changes the material parameter from metal to conductive elastomer. This transformation reduces contact resistance by increasing contact area and improves measurement accuracy while eliminating destructive effects on the semiconductor material.
Solution Approach 2:
The probe employs a composite structure combining conductive elastomer material with a specific geometric configuration. The conductive elastomer provides both electrical conductivity and compliant contact properties, creating a composite solution that simultaneously addresses measurement accuracy and non-destructive requirements.
2Adaptability or versatility
If conventional four-point probes are used, then resistivity measurement is achieved, but the ability to measure other electrical characteristics is lost
Solution Approach 1:
The probe design with flat conductive elastomer surfaces provides universal applicability for multiple electrical measurement techniques beyond just four-point probe resistivity measurements. The same probe structure can be used for capacitance, conductance, and other electrical characteristic measurements, enhancing versatility without sacrificing measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, non-destructive measurement of sheet resistance and contact resistivity in semiconductor materials, even with high contact resistance, providing comprehensive electrical characterization beyond traditional resistivity measurements.
Implementation Method 1
An elastic multi-contact probe may include multiple conductive strips each of which comprises a conductive elastomer
Data Source
AI summary
This disclosure describes an elastic multi-contact probe that includes conductive strips each of which comprises a conductive elastomer; dielectric strips formed on a back surface of a respective conductive strip; and a layer of a thermoplastic formed on back surfaces of the dielectric strips. The disclosure also describes a method that includes measuring a first I-V curve between a pair of inner probes of the an elastic multi-contact probe based on a first current applied to a pair of outer probes; determining a first slope of a linear region of the first I-V curve; measuring a second I-V curve between the pair of inner probes based on a second current applied to the pair of inner probes; determining a second slope of a linear region of the second I-V curve; and calculating a sheet resistance and a contact resistivity of the semiconductor material based on the first and second slopes.