Elastic Nozzle Diaphragm for Accurate Optical Scanning
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Solution Overview
Problem
Existing optical processing methods struggle with accuracy and efficiency due to distortions in workpieces, leading to processing errors and limitations in scanning speed.
Innovation Solution
An optical processing apparatus with a diaphragm member having an arcuate shape and an elastic part that elastically deforms to maintain contact with the workpiece, allowing it to follow distortions and ensure consistent light beam intensity regardless of scanning speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a freely movable nozzle is pressed against the workpiece with constant gas pressure, then the nozzle can follow workpiece distortions, but the scanning speed is limited because the nozzle cannot follow large distortions at high speeds
Solution Approach 1:
The nozzle is designed with a movable diaphragm member that dynamically adjusts its position to follow workpiece surface distortions. The diaphragm can elastically deform and move independently along the scanning direction, allowing the nozzle to adapt to surface variations without limiting scanning speed. This dynamic adaptation mechanism enables both high precision processing and high productivity.
Solution Approach 2:
The system changes the physical state of the diaphragm from rigid to elastic, allowing it to deform and conform to workpiece surface variations. By making the diaphragm elastic rather than rigid, it can adapt to distortions of any magnitude without mechanical contact constraints, thereby maintaining processing accuracy at high scanning speeds.
2Productivity
If the workpiece distance varies due to substrate distortions, then processing errors occur in operations with accuracy less than 0.1 mm
Solution Approach 1:
The patent replaces rigid mechanical contact with elastic deformation of the diaphragm. Instead of relying on rigid mechanical positioning that cannot accommodate distortions, the elastic diaphragm passively adapts to surface variations through material deformation, maintaining consistent processing accuracy without mechanical complexity.
3Device complexity
If the nozzle is pressed against the workpiece with constant force, then the structure is simple, but it cannot follow large distortions resulting in processing errors
Solution Approach 1:
The diaphragm is constructed as a thin, flexible elastic member that can deform to match workpiece surface contours. This flexible film structure allows the nozzle to follow large distortions while maintaining a relatively simple overall design, avoiding complex mechanical adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables highly accurate and efficient processing of micro-patterns by maintaining stable contact with the workpiece, even in the presence of distortions, thereby ensuring uniformity and high resolution.
Implementation Method 1
the diaphragm member includes an elastic part elastically deformable in a third direction
Data Source
AI summary
An optical processing method for performing a processing operation on a target surface of a workpiece by an optical processing apparatus including a nozzle that lets a light beam and a placement part having a placement surface for placing the workpiece. The nozzle includes a diaphragm member having an aperture configured to let at least part of the light beam pass through in an end portion facing the placement surface. The diaphragm member has an arcuate shape convex toward the placement surface and includes an elastic part elastically deformable in a direction intersecting the placement surface. When processing the workpiece, the diaphragm member is pressed against the workpiece to elastically deform the elastic part. The nozzle is moved relative to the workpiece while pressing the workpiece with an elastic force of the elastic part, and the nozzle irradiates the workpiece with the light bean from the nozzle.