Elastic Retainer for Semiconductor Wafer Rotation Prevention
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Solution Overview
Problem
Conventional substrate storage containers face challenges in preventing semiconductor wafer rotation, contamination, and damage due to uneven holding forces, which can lead to particle production, contamination, and breakage, especially during transportation and impact events.
Innovation Solution
A retainer with a frame featuring paired first elastic parts and a second elastic part that supports the substrate, with holds positioned to distribute force evenly and absorb impacts, attached to the door of the storage container to stabilize the wafer and simplify attachment operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the holding forces of the left and right holds are enhanced to restrain wafer rotation, then rotation prevention is improved, but strong resistance occurs during door fitting, causing automatic door opening/closing equipment to exceed specified capacity
Solution Approach 1:
The elastic piece is divided into multiple independent elastic portions (first elastic portion, second elastic portion, third elastic portion) that can deform independently. This segmentation allows the holding structure to distribute forces more evenly, preventing excessive resistance during door fitting while maintaining wafer rotation prevention capability.
Solution Approach 2:
The elastic portions are designed to be flexible and deformable, allowing dynamic adjustment during door fitting. The elastic portions can compress and expand to accommodate the fitting process, reducing peak resistance forces while maintaining holding effectiveness once fitted.
2Device complexity
If a single elastic piece with a single hold is used to hold the wafer rim, then the structure is simple, but vibration and impact during transportation cause the wafer to dislodge or break
Solution Approach 1:
The retainer structure is segmented into multiple elastic portions (first, second, and third elastic portions) that can independently deform to absorb vibrations and impacts during transportation. This segmentation provides multiple contact points and deformation zones, enhancing wafer security without significantly increasing structural complexity.
Solution Approach 2:
The elastic portions are pre-designed with inherent elasticity to cushion against upcoming vibrations and impacts during transportation. The elastic portions can compress and expand to absorb shock before it reaches the wafer, preventing dislodgement and breakage during transit.
3Productivity
If the retainer is shallowly attached to the door's backside to reduce stroke, then space-saving and work efficiency are improved, but the angle between holds is small, making it difficult to restrain wafer rotation
Solution Approach 1:
The elastic portions are positioned asymmetrically on the door's backside, with the first elastic portion on one side and the second and third elastic portions on the other side. This asymmetric arrangement creates optimal angular separation between holding points, enabling effective wafer rotation restraint even with shallow attachment that reduces door stroke.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents wafer rotation and contamination, alleviates impact stress, and simplifies the attachment process, ensuring secure holding and reducing the risk of breakage and abrasion.
Implementation Method 1
a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other; and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate
Data Source
AI summary
A retainer includes a frame, a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other, and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate. The outside end of the second elastic part is positioned outside the free end of the first elastic part and closer to the opposing part of the frame. Also, first and second holds for holding the rim of the substrate are formed apart from each other. The second hold is positioned on the outer end side of the second elastic part from the first hold.