Elastic Retention Wheel Spoke Design for Wafer Adapter Stability

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Solution Overview

Problem

Elastic retention wheels in wafer adapters for semiconductor manufacturing are prone to cracking due to non-uniform force exertion, leading to unstable wafer securing and potential breakage or contamination.

Innovation Solution

The introduction of spokes between the retention main body and rim of the elastic retention wheel, along with sliding rails, disperses non-uniform forces and prevents over-deformation, enhancing the supporting force and reducing the likelihood of cracking.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If elastic retention wheels are used to secure wafer adapters in FOUPs, then wafer adapters can be stably retained, but the wheels are prone to cracking due to non-uniform force exertion

Engineering Contradiction:

Improvestability of wafer adapter retentionVSAvoidcrack resistance of retention wheel rim

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The retention wheel is segmented into a rim, retention main body, and multiple spokes. The spokes divide the force transmission path into multiple segments, distributing the load evenly across the structure and preventing stress concentration at any single point, thereby eliminating the cracking issue while maintaining retention stability.

Inventive Principle:

Principle #1Segmentation

2Adaptability or versatility

If the rim of the elastic retention wheel is overly deformed by excessive pressing force, then the wheel can adapt to different wafer sizes, but the rim cracks and compromises wafer safety

Engineering Contradiction:

Improvecompatibility with different wafer sizesVSAvoidwafer scratching or breakage from cracked rim

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The wheel structure is divided into rim, main body, and spokes. The spokes act as load-bearing elements that distribute pressing forces uniformly across the rim, allowing the rim to deform elastically for adaptability without exceeding the material's elastic limit, thus preventing cracks and wafer damage.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The retention wheel uses a composite structure combining a rigid rim for structural integrity, a flexible retention main body for elastic deformation, and spoke elements for force distribution. This composite design enables the wheel to adapt to different wafer sizes while maintaining rim integrity and preventing wafer damage.

Inventive Principle:

Principle #40Composite materials

3Device complexity

If conventional elastic retention wheels are used, then the structure is simple, but the wheels cannot provide stable retention and cause wafer breakage

Engineering Contradiction:

Improvestructural simplicity of retention wheelVSAvoidstable retention of wafer adapter

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The wheel is divided into three main segments: rim, retention main body, and spokes. This segmentation adds structural complexity that enables stable retention through uniform force distribution, while the modular design keeps manufacturing relatively simple.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The spoke structure adds a radial dimension to force distribution, transforming the force transmission from a direct radial-compression model to a distributed triangulated support model. This dimensional addition provides stable retention while maintaining manufacturing feasibility.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration stabilizes the wafer adapter, prevents rim deformation and cracking, and minimizes the risk of wafer breakage and contamination, ensuring secure and reliable wafer handling.

Implementation Method 1

through supplying spokes between the retention main body and rim of an elastic retention wheel for a wafer adapter, an enhanced supporting force is provided for the elastic retention wheel, thus diminishing or eliminating the occurrence of wheel crash

Methodology Applied

Scientific EffectForce distribution: Mechanical Force

Implementation Method 2

when elastic retention wheel 104 receives an excessive pressing force, rim 106 of elastic retention wheel 104 may be overly deformed, causing the rim 106 to crack

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS9111973B2Elastic retention wheels and wafer adapter containing the same wheels

Publication Date: 2015.08.18 SEMICON MFG INT (SHANGHAI) CORP

AI summary

An elastic retention wheel and a wafer adapter containing this wheel are disclosed. The elastic retention wheel comprises: a rim; a retention main body positioned within the rim; and a plurality of spokes. Each spoke is positioned in a space between the rim and the retention main body. One end of each spoke is coupled to the retention main body, and the other end is coupled to the rim. A sliding rail can be provided on an inner side of the rim, and the spoke's other end can slide with the sliding rail. When the elastic retention wheel is stressed by a non-uniform or excessive external force, these spokes provide enhanced support from the rim's inner side, or at least partially disperse the non-uniform external force applied to the elastic retention wheel. Thereby, the elastic retention wheel is largely kept from over-deformation or cracking.