Elastic Reticle Container Support for Uniform Immobilization
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Solution Overview
Problem
Existing reticle storage containers for EUV applications are bulky, prone to abrasion, and apply uneven forces on reticles due to varying thicknesses and manufacturing inaccuracies, leading to potential contamination and mechanical stress.
Innovation Solution
A container design with an upper and lower component, featuring an elastic article support and immobilizers that apply a uniform counterforce to reticles, reducing mechanical stress and preventing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional EOPs are used to immobilize the EIP and protect reticles, then reticle protection and immobilization are achieved, but the footprint and volume requirements increase significantly
Solution Approach 1:
The container is divided into separate components: a removable EIP containing the reticle and a stationary EOP providing protection. This segmentation allows the EIP to be compact while the EOP provides external protection, reducing overall footprint compared to fully enclosed conventional designs.
Solution Approach 2:
The EIP is nested within the EOP structure, with the EIP containing the reticle and the EOP providing an outer protective layer. This nested arrangement allows both protection functions to be achieved in a compact configuration, minimizing the container footprint while maintaining reticle protection.
2Ease of manufacture
If polymeric materials are used for EOP construction, then ease of manufacture is improved, but abrasion and outgassing of volatile organic compounds occur leading to contamination
Solution Approach 1:
The container uses composite material construction: the EOP is made from low-outgassing materials such as metal or ceramic composites rather than conventional polymeric materials. This reduces volatile organic compound outgassing and abrasion-induced contamination while maintaining manufacturability through advanced fabrication processes.
3Stability of the object's composition
If fixed immobilizers are used to restrict reticle movement, then reticle immobilization is achieved, but uneven forces are applied due to varying reticle thicknesses and manufacturing inaccuracies
Solution Approach 1:
The immobilizer system is designed to be adjustable and adaptable rather than fixed. The EIP includes movable support surfaces and adjustable immobilizer positions that can be dynamically repositioned to accommodate varying reticle thicknesses and dimensional variations, ensuring uniform force distribution across different reticles.
Solution Approach 2:
The container system allows adjustment of key parameters including immobilizer position, support surface elevation, and clamping force magnitude. These parameters can be modified based on the specific reticle being stored, enabling uniform force application despite variations in reticle thickness and manufacturing tolerances.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures reliable reticle support and uniform force application, minimizing mechanical damage and contamination, while maintaining a compact footprint.
Implementation Method 1
the article support is configured to elastically retract upon the article being pushed towards the article support by a pushing force, wherein the elastic retraction produces a counter force biasing the article in a direction opposite the direction of the pushing force
Data Source
Figure 1
Figure 2
Figure 3A~4
AI summary
The invention relates to a container (100) for storing and/or transporting a semiconductor fabrication article (190), particularly one or more of a wafer, a chip, a substrate and a photolithography mask, particularly an EUV reticle, the container (100) comprising an upper component (110) and a lower component (120), wherein the upper component (110) is reversibly attachable to the lower component (120), the container (100) further comprising an article support (140) provided within at least one of the upper (110) and the lower (120) components, wherein the article support (140) is configured to support one article (190) to be stored and/or transported in the container (100) and to restrict movement of the article (190) relative to the container (100), wherein the article support (140) is configured to elastically retract upon the article (190) being pushed towards the article support (140) by a pushing force (192), wherein the elastic retraction produces a counter force biasing the article (190) in a direction opposite the direction of the pushing force (192). The invention further provides a dual pod for storing and/or transporting a semiconductor fabrication article (190) using such a container (100) as an inner pod and an article support (140) for such a container (100).