Elastic Substrate Holder Layout for High-Speed Thin Disk Conveyance
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Solution Overview
Problem
Increasing the conveying speed in film formation apparatuses to enhance productivity risks substrate falling due to vibration and deformation or breakage, especially with thinner substrates used in magnetic recording media.
Innovation Solution
A substrate holder with elastically-deformable supporting members positioned at specific angles supports the substrate at upper and lower circumferential end portions to stabilize it during high-speed conveyance, preventing falling and deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrate conveying speed is increased to enhance productivity, then productivity is improved, but substrate is more likely to fall due to vibration and acceleration
Solution Approach 1:
The supporting members are positioned at specific locations around the substrate periphery rather than uniformly distributed. Four supporting members are strategically placed at angular positions (first and second at 15°-40° from uppermost position, third and fourth at 10°-15° from lowermost position) to provide localized support where needed most during high-speed conveying, preventing substrate falling while maintaining productivity.
2Reliability
If supporting force is increased to prevent substrate falling, then substrate falling is inhibited, but substrate is more likely to deform or break
Solution Approach 1:
The supporting members are designed with elastic-deformable properties, allowing them to change their support characteristics dynamically. This elasticity enables the supporting members to adapt to substrate variations and conveyance conditions, providing sufficient support force to prevent falling while avoiding excessive force that would cause deformation or breakage of thin substrates.
3Reliability
If four supporting members are used to securely hold substrate, then substrate falling is prevented, but device complexity increases
Solution Approach 1:
The substrate support function is segmented into four distinct supporting members positioned at different locations around the substrate periphery. This segmentation allows each supporting member to independently manage support at its specific position, providing comprehensive substrate holding stability while keeping each individual component simple and manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively inhibits substrate falling and deformation, maintaining high productivity and accommodating reduced substrate thickness, thus enhancing the efficiency of film formation processes.
Implementation Method 1
at least four supporting members attached elastically-deformably on a periphery of the hole portion
Data Source
AI summary
Falling of a substrate and deformation or breakage of the substrate are inhibited. A substrate holder includes a hole portion in which a disk-shaped substrate is placed upright, and at least four supporting members attached elastically-deformably on a periphery of the hole portion. Two of the four supporting members support disk-shaped substrate at first- and second-side circumferential end portions of disk-shaped substrate positioned at vertical-direction upper positions of disk-shaped substrate. Remaining two of the four supporting members support disk-shaped substrate at third- and fourth-side circumferential end portions of disk-shaped substrate positioned at vertical-direction lower positions of disk-shaped substrate. Central angle in disk-shaped substrate between either first- or second-side circumferential end portion and uppermost end portion of disk-shaped substrate is from 15° through 40°. Central angle in disk-shaped substrate between either third- or fourth-side circumferential end portion and lowermost end portion of disk-shaped substrate is from 10° through 15°.