Elastic Support for Optical Detection Calibration
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Solution Overview
Problem
Conventional semiconductor examination systems face challenges in accurately detecting and calibrating the geometric information of samples due to fixed detector positions and limited ability to detect displacements in multiple planes, leading to suboptimal light projection and degraded reflected light quality.
Innovation Solution
An apparatus with an elastic supporting assembly and optical-electronic assembly that adjusts its position and orientation to optimize light projection onto the sample, allowing for precise detection of geometric information and calibration of relative positions, and using multiple detectors to cover displacements in different planes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the detector is fixed on the base, then the device complexity is reduced, but the measurement precision deteriorates when the base is improperly located
Solution Approach 1:
The patent makes the detector movable relative to the base by introducing an elastic supporting assembly that allows six-degree-of-freedom adjustment. This dynamic mounting structure enables the detector to adapt its position and orientation to achieve optimal detection conditions, resolving the contradiction between simple fixed mounting and precise measurement requirements.
2Device complexity
If only one detector is used, then the device complexity is reduced, but the measurement precision deteriorates when the sample has displacement around the light
Solution Approach 1:
The patent divides the detection function into multiple detectors positioned at different locations. Each detector is responsible for detecting geometric information in specific directions, and their results are combined to achieve comprehensive and accurate measurement of sample displacement in all directions, resolving the limitation of single-detector systems.
3Ease of repair
If the base location changes during maintenance, then the ease of repair is improved, but the measurement precision deteriorates
Solution Approach 1:
The patent implements a feedback mechanism where the detector continuously monitors the geometric relationship between the base and sample. When the base location changes during maintenance, the system detects the deviation and provides feedback for recalibration, enabling automatic or assisted re-adjustment to restore measurement precision without complex manual procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy and precision of geometric information detection and calibration, ensuring optimal light reflection quality and effective detection of sample displacements across multiple planes.
Implementation Method 1
The optical-electronic assembly could project a light beam to the sample, receive a reflected light beam from the sample
Data Source
AI summary
An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optical-electronic assembly for detection of the sample initiated with a light projected to the sample and an elastic supporting assembly for providing motion freedoms to adjust the relative geometric conditions between the optical-electronic assembly and the sample. The elastic supporting assembly has a planer structure and a cubic structure, and provides both motion freedoms on a plane and motion freedoms vertical to the plane. The optics electricity optical-electronic assembly could analyze the received reflected light to get geometric information of the sample, and could adjust the light used to detect the sample.