Elastomer Band Installation Fixture for Plasma Etching

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Solution Overview

Problem

Elastomer bands used to protect substrate supports in plasma etching environments degrade quickly due to exposure to corrosive plasmas and compression forces, leading to localized stresses and premature cracking, necessitating frequent replacement.

Innovation Solution

An elastomer band installation fixture that reduces local stresses by using a mechanical fastener system and embedding tool to securely mount the elastomer band around a substrate support, ensuring even distribution and minimizing exposure to plasma environments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If an elastomer band is installed by hand in a 5-point star-shaped pattern, then installation is simple and quick, but localized stresses are created that lead to premature degradation and cracking

Engineering Contradiction:

Improveinstallation simplicityVSAvoidresistance to degradation

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The elastomer band is pre-stretched to a predetermined percentage (e.g., 5-10%) before installation. This preliminary action ensures the band is properly tensioned from the start, distributing stress uniformly across the entire circumference rather than creating localized stress concentrations during manual installation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

A mandrel is introduced as an intermediary tool during installation. The mandrel provides a standardized circular form around which the elastomer band is wrapped, ensuring uniform distribution of compression forces and eliminating the localized stress areas created by hand-installation patterns.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Strength

If the elastomer band is stretched too much during installation, then it fits snugly around the substrate support, but the localized stress areas become weaker and more susceptible to plasma degradation

Engineering Contradiction:

Improvefit snuglinessVSAvoidresistance to plasma degradation

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

The stretching percentage is precisely controlled within a specific range (e.g., 5-10%) rather than using excessive force. This parameter optimization ensures the band fits snugly without creating overstressed localized areas that would be vulnerable to plasma environment degradation.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the elastomer band is not stretched enough during installation, then localized stress areas are reduced, but the band becomes loose and allows plasma exposure to the adhesive

Engineering Contradiction:

Improvestress distributionVSAvoidplasma exposure to adhesive

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Inventive Principle:

Principle #24Intermediary (Mediator)

4Ease of manufacture

If traditional hand-installation methods are used, then installation cost is low, but the elastomer band requires frequent replacement due to degradation

Engineering Contradiction:

Improveinstallation costVSAvoidoperational lifetime

Core Design Contradiction:

Ease of manufactureVSDuration of action of stationary object

Solution Approach 1:

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS9355884B2Installation fixture for elastomer bands and methods of using the same

Publication Date: 2016.05.31 LAM RES CORP

AI summary

A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.