Installation Fixture for Elastomer Bands in Plasma Chambers
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Solution Overview
Problem
Elastomer bands used to protect substrate supports in plasma processing chambers degrade due to exposure to plasma environments and compression forces, leading to localized stresses and premature cracking.
Innovation Solution
An installation fixture with an annular ring and base plate is used to mount an elastomer band in a mounting groove around a semiconductor substrate support, reducing localized stresses and improving durability by allowing for even distribution of forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an elastomer band is disposed around a substrate support by hand in a 5-point star-shaped pattern, then the elastomer band can be installed without specialized equipment, but highly localized stress areas are created in the elastomer leading to premature cracking and degradation
Solution Approach 1:
The installation fixture is prepared in advance with an annular ring and base plate structure that pre-defines the correct positioning and distribution pattern for the elastomer band. This preliminary preparation eliminates the need for manual star-shaped placement during installation, ensuring uniform stress distribution from the start and preventing localized stress concentrations that lead to cracking.
2Reliability
If an elastomer band is used to protect adhesive from plasma exposure, then the adhesive is protected from degradation, but the elastomer band itself is directly exposed to plasma and suffers degradation leading to reduced operational lifetime
Solution Approach 1:
The installation fixture modifies the physical parameters of elastomer band installation by providing uniform radial support and even compression force distribution. This changes the stress state of the elastomer band from highly localized peaks to uniform distribution, reducing the rate of plasma-induced degradation and extending operational lifetime while maintaining protection of the adhesive.
3Reliability
If the elastomer band is subjected to compression forces under operational conditions, then the elastomer band maintains sealing function, but the compression forces combined with plasma exposure accelerate degradation and cracking
Solution Approach 1:
The installation fixture creates an equipotential stress distribution in the elastomer band by providing uniform radial support through the annular ring and base plate structure. This ensures that compression forces are evenly distributed around the entire circumference of the elastomer band rather than concentrated at specific points, maintaining sealing function while preventing stress-induced cracking under operational conditions.
Data Source
AI summary
An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.