Metal-Plated Conductive Elastomer Probe Head for Low-Cost Replacement

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Solution Overview

Problem

Conventional probe heads for semiconductor testing are expensive and require complex manufacturing processes, making them costly and difficult to repair or replace.

Innovation Solution

A probe head design featuring a metal-plated conductive elastomer with a ceramic or organic substrate, copper vias, and gold-plated elastomer heads, manufactured using pico-liter dispensers or screen printing, providing a simpler and less expensive solution with improved durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional probe heads are used, then testing functionality is achieved, but manufacturing cost is high and repairability is difficult

Engineering Contradiction:

Improvemanufacturing costVSAvoidprobe head durability

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The probe head is divided into separate modular components: a reusable substrate/board and replaceable probe tips. This segmentation allows the expensive functional substrate to be reused while only the consumable probe tips are replaced, significantly reducing overall manufacturing cost and improving repairability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The probe tips are designed as disposable or easily replaceable components with lower cost materials, while the main substrate uses durable, reusable materials. This allows the system to use cheap short-lived probe tips that can be replaced rather than repairing expensive permanent probe heads.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Ease of manufacture

If conventional probe heads are used, then electrical testing capability is provided, but manufacturing complexity is high

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidprobe head structure

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The probe head structure is segmented into a simple substrate and separate probe tip assemblies. This reduces manufacturing complexity by allowing each component to be manufactured independently using optimized processes, then assembled through standardized interfaces.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The substrate is designed as a universal platform that can support different probe tip configurations and arrangements. This multi-functionality allows the same substrate to be reused with different probe tip arrays, simplifying manufacturing by avoiding custom substrates for each probe head design.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design reduces manufacturing costs and enhances the ease of repair and replacement of probe heads, offering a more economical and reliable testing solution for semiconductor dies.

Implementation Method 1

a metal layer disposed on the electrically conductive elastomer head

Methodology Applied

Scientific EffectElectroplating: Electroplating

Data Source

PatentUS20260002961A1Metal Plated Conductive Elastomer Sort Probe

Publication Date: 2026.01.01 INTEL CORP

AI summary

According to the various aspects, a testing probe may include an electrically conductive pad disposed on a substrate with an electrically conductive elastomer head disposed on the electrically conductive pad and a metal layer disposed on the electrically conductive elastomer head. In an aspect, a plurality of the testing probes are disposed on the substrate to form a probe head interposer.