Elastomer Ring Installation Guiding Sheet and Jig
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Solution Overview
Problem
Conventional semiconductor processing equipment faces challenges in accurately and evenly installing elastomer rings into small grooves, leading to potential equipment failure, fluid leakage, and pollution due to the rings' erosion by etching gases and fluids, making it difficult to predict their lifetime and maintain effective sealing.
Innovation Solution
A method utilizing a guiding sheet and jigs to step-by-step position and press the elastomer ring into the groove, defining its outer surface into arcs and using partial and full filling jigs to ensure even installation, preventing rotation and protrusion, and ensuring complete filling without damaging the equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the elastomer ring is manually installed into the small groove, then the sealing function is achieved, but the installation accuracy and evenness cannot be ensured
Solution Approach 1:
The patent introduces a guiding sheet as an intermediary tool between the installer and the elastomer ring. The guiding sheet includes a guiding groove that precisely guides the elastomer ring into the target groove, ensuring accurate positioning and even installation without requiring high manual dexterity. This mediator tool bridges the gap between simple manual operation and precise installation requirements.
Solution Approach 2:
The guiding sheet is prepared in advance with the guiding groove formed to match the target groove dimensions. The elastomer ring is first placed on the guiding sheet, which pre-positions it correctly before insertion. This preliminary preparation of the installation tool ensures that the ring is properly oriented and positioned before the actual installation action occurs.
2Productivity
If the elastomer ring is pressed into the groove without guidance, then installation speed is improved, but the ring may rotate or protrude affecting equipment operation
Solution Approach 1:
The guiding sheet acts as a mediator that constrains the elastomer ring's movement during installation. The guiding groove prevents rotation and ensures the ring is pressed in evenly without protruding into the passage. This allows faster installation while maintaining reliability, as the guiding structure prevents improper positioning that would compromise equipment operation.
Solution Approach 2:
The guiding sheet is made of a flexible material that can be easily manipulated during installation. The thin film structure allows the sheet to conform to the groove geometry while providing sufficient guidance constraints. This flexibility enables quick installation without compromising the guiding function that prevents rotation and protrusion.
3Loss of time
If the elastomer ring is not installed evenly in the groove, then installation time is reduced, but the lifetime of the ring cannot be estimated and sealing effectiveness is compromised
Solution Approach 1:
The guiding sheet ensures even distribution of the elastomer ring within the groove through its precisely formed guiding groove. This even installation, facilitated by the guiding intermediary, allows for predictable wear patterns and extends the ring's service life. The uniform positioning prevents localized stress concentrations that would premature the ring, while the quick installation process minimizes installation time.
Data Source
AI summary
Provided are a method, a guiding sheet, a partial filling jig, and a full filling jig for installing an elastomer ring in the semiconductor processing equipment. The guiding sheet, the partial filling jig, and the full filling jig dispose the elastomer ring in the groove of the semiconductor processing equipment smoothly and evenly. Furthermore, the surface of the elastomer ring may be divided to multiple arcs portions. Each one of the arc portions may be pressed by the partial filling jig or the full filling jig in a particular sequence. When the groove is filled by the elastomer ring accurately and completely, the elastomer ring may block the fluid and the etching gas effectively. The elastomer ring may help the semiconductor processing equipment to work continuously and maintain qualities of the etching wafers.