Elastomer Seal UV Resistance via Carbon Bond Multiplicity

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Solution Overview

Problem

Elastomer seals in semiconductor manufacturing tools, such as PTFE, are highly susceptible to ultraviolet radiation degradation due to single carbon-carbon bonds with low bond energy, leading to reduced lifespan and increased maintenance costs.

Innovation Solution

Developing elastomer seals with an average number of bonds between carbon atoms greater than 1.00, specifically using polymers like polytetrafluoropropadiene or polydifluoroacetylene with increased bond energy to withstand UV radiation exposure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If elastomer seals with single carbon-carbon bonds (e.g., PTFE) are used, then the seals provide good sealing performance and ease of manufacture, but they are highly susceptible to UV radiation degradation due to low bond energy

Engineering Contradiction:

ImproveUV radiation resistanceVSAvoidmanufacturing complexity

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the chemical parameter of the elastomer by increasing the average number of bonds between carbon atoms from 1.00 to greater than 1.00 (e.g., 1.03-1.07), thereby increasing bond energy and UV radiation resistance while maintaining the elastomer's sealing function

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite elastomer material that combines carbon chains with increased bond multiplicity (greater than 1.00 average bonds per carbon-carbon linkage) with sealing functionality, achieving both UV resistance and sealing performance in a single integrated material

Inventive Principle:

Principle #40Composite materials

2Duration of action of stationary object

If elastomer seals exposed to UV radiation through transparent components are used, then the processing tool allows plasma process visibility and UV sterilization, but the elastomer seal lifespan is significantly reduced

Engineering Contradiction:

Improveelastomer seal lifespanVSAvoidUV radiation exposure

Core Design Contradiction:

Duration of action of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent modifies the chemical parameter of the elastomer (average bonds between carbon atoms) to increase bond energy above the UV photon energy threshold, thereby preventing UV-induced bond breaking and extending seal lifespan despite continuous UV exposure through transparent components

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The enhanced bond energy in the elastomer seals significantly reduces UV degradation, extending their lifespan and reducing maintenance costs and downtime in semiconductor processing tools.

Implementation Method 1

The photon energy of UV radiation (especially UV-B radiation and UV-C radiation) is high enough to break the carbon-carbon bonds. This results in an decrease in the useable lifespan of the elastomer seals.

Methodology Applied

Scientific EffectUltraviolet radiation absorption: Absorption (EM radiation)

Data Source

PatentUS20230145789A1Methods and materials for making elastomer resistant to degradation by ultraviolet radiation and plasma

Publication Date: 2023.05.11 APPLIED MATERIALS INC

AI summary

In an additional embodiment, a semiconductor processing tool is provided. In an embodiment, the semiconductor processing tool, comprises a chamber, and a lid sealing the chamber. In an embodiment, with an elastomer seal is between the chamber and the lid. In an embodiment, the elastomer seal comprises a polymer with carbon chains, where an average number of bonds between carbons in the carbon chains is greater than 1.00. In an embodiment a portion of the processing tool is transparent to ultraviolet radiation so that the elastomer seal is exposed to the ultraviolet radiation.