Elastomer Seal Composition for Compression Fracture Resistance
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Solution Overview
Problem
Elastomer seal materials are prone to compression fracture due to increased compressibility at high temperatures, and existing methods to enhance resistance, such as reducing crosslink density or controlling molecular weight, lack versatility and effectiveness.
Innovation Solution
An elastomer composition incorporating phenol resin and silica in powder form, crosslinked and molded to create a seal material with improved resistance to compression fracture and compression set, suitable for semiconductor manufacturing devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the crosslink density of rubber is reduced to enhance resistance to compression fracture, then the resistance to compression fracture is improved, but the compression set deteriorates
Solution Approach 1:
The patent uses a composite material system consisting of rubber, phenol resin powder, and silica powder. The phenol resin and silica form a reinforcing network within the rubber matrix, creating a composite structure that simultaneously improves compression fracture resistance and maintains compression set properties without requiring crosslink density reduction.
Solution Approach 2:
The patent changes the physical state parameter of the phenol resin and silica from granular to powder form, and controls their particle size distribution. This parameter change allows for better dispersion and interaction with the rubber matrix, enabling improved mechanical properties while maintaining optimal crosslink density.
2Strength
If the molecular weight of rubber is controlled to enhance resistance to compression fracture, then the resistance to compression fracture is improved, but the versatility of polymerization conditions deteriorates
Solution Approach 1:
The patent introduces phenol resin powder and silica powder as intermediary substances that mediate the mechanical properties of the rubber. These additives provide the necessary reinforcement for compression fracture resistance independently of the rubber's molecular weight, allowing standard polymerization conditions to be maintained across different applications.
3Adaptability or versatility
If compressibility is increased to accommodate design matters, tolerance, and expansion during heating, then the adaptability is improved, but the resistance to compression fracture deteriorates
Solution Approach 1:
The patent incorporates phenol resin powder and silica powder as a pre-established reinforcing network that cushions against compression fracture. This reinforcing structure is built into the material before use, allowing the seal to accommodate higher compressibility for design tolerance and thermal expansion while maintaining resistance to compression fracture through the distributed particle reinforcement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The elastomer composition effectively prevents compression fracture and maintains excellent compression set properties, ensuring airtightness in mechanical devices, particularly under high-temperature and high-pressure conditions.
Implementation Method 1
the seal material of the present disclosure is obtained by crosslinking and molding the elastomer composition of the present disclosure
Data Source
AI summary
To achieve properties such as a desirable compression fracture property, desirable compression set, and the like in the elastomer composition and the seal material using same. The elastomer composition of the present disclosure therefore includes an elastomer, phenol resin in powder form, and silica in powder form. The seal material of the present disclosure is obtained by crosslinking and molding the elastomer composition of the present disclosure. The seal material may be used in a semiconductor manufacturing device.