Metal-Coated Elastomer Seals for UV and Plasma Resistance
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Solution Overview
Problem
Semiconductor processing chambers face contamination issues due to the damage of sealing articles by UV radiation, leading to particle contaminations on semiconductor substrates, which existing fluorine-containing elastomers fail to adequately resist.
Innovation Solution
A sealing article with a polymeric elastomer body, coated with a metal or metal-containing material, providing excellent resistance to UV and plasma, and featuring high temperature resistance, chemical resistance, and high purity, is developed. The article is made using perfluoroelastomers and fluoroelastomers with a coating layer of aluminum or other metals, ensuring durability and preventing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If resilient sealing rings made of polymer material are used to seal processing chambers, then sealing performance is improved, but the sealing rings are damaged by UV radiation and plasma, causing particle contamination
Solution Approach 1:
The patent applies composite materials by combining a polymer elastomer base material with a metal coating layer. The polymer provides sealing performance while the metal coating (such as aluminum, stainless steel, or nickel) provides resistance to UV radiation and plasma damage. This composite structure resolves the contradiction by integrating the advantages of both materials: the flexibility and sealing capability of polymers with the durability and radiation resistance of metals.
Solution Approach 2:
The patent changes the physical and chemical parameters of the sealing ring by applying a metal coating layer with specific thickness (e.g., 1-10 micrometers) and specific material properties. This parameter change transforms the sealing ring from a pure polymer structure vulnerable to UV damage into a composite structure with enhanced radiation resistance while maintaining sealing functionality.
2Reliability
If existing fluorine-containing elastomers are used in processing chambers, then chemical resistance is improved, but they fail to resist UV radiation and cause particle contamination on substrates
Solution Approach 1:
The patent uses composite materials where the fluorine-containing elastomer base maintains excellent chemical resistance to corrosive chemicals and plasma, while the added metal coating layer prevents UV radiation damage that would otherwise cause particle contamination. This composite approach allows the sealing ring to simultaneously achieve chemical resistance and UV resistance without compromising either property.
Solution Approach 2:
The metal coating layer acts as an intermediary protective barrier between the fluorine-containing elastomer and the UV radiation environment. This intermediary layer absorbs or reflects UV radiation before it can reach and degrade the polymer material, thereby preventing the generation of harmful particles while allowing the elastomer to maintain its chemical resistance functions.
3Productivity
If sealing rings are exposed to harsh environments with high UV and plasma exposure, then processing capability is improved, but the sealing rings degrade quickly, reducing service life
Solution Approach 1:
The patent employs composite materials where the metal coating layer provides protection against UV radiation and plasma erosion, enabling the sealing ring to withstand harsh processing environments for extended periods. This composite structure allows continuous operation in high UV exposure conditions without rapid degradation, thereby extending service life while maintaining full processing capability.
Solution Approach 2:
The metal coating layer serves as a beforehand cushioning protective layer that absorbs the damaging effects of UV radiation and plasma exposure before they can affect the polymer elastomer. This pre-established protection allows the sealing ring to operate in harsh environments without rapid degradation, effectively cushioning against environmental damage and extending operational life.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sealing article maintains integrity and prevents chemical or particulate contamination, offering a long service life even in harsh environments with high UV and plasma exposure, ensuring high-quality semiconductor processing.
Implementation Method 1
providing excellent resistance to UV and plasma
Implementation Method 2
providing excellent resistance to UV and plasma
Implementation Method 3
maintains integrity and prevents chemical or particulate contamination
Data Source
AI summary
A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.