Elastomeric Test Interface with Embedded Vias for Fine-Pitch Contact
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Solution Overview
Problem
Existing testing head probes are fragile, costly, and difficult to assemble, with challenges in forming reduced pitches, requiring complex replacement and mechanical elements.
Innovation Solution
A method for manufacturing an interface element with embedded metal conductors in an elastomeric matrix, using non-vertical conductors with alternating vertical and horizontal segments to form a spring structure, eliminating the need for mechanical probes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If vertical needle probes are used in testing heads, then high probe density per unit area is achieved, but the probes become fragile and difficult to assemble and replace
Solution Approach 1:
The patent replaces the mechanical needle probe system with an elastomeric bearing system that has embedded conductive segments. The elastomeric material provides both mechanical support and electrical conduction, eliminating the need for separate mechanical probes. This substitution resolves the fragility issue while maintaining the ability to achieve reduced pitches through the flexible elastomeric structure.
Solution Approach 2:
The patent creates a composite structure by embedding conductive segments within an elastomeric matrix. The conductive segments provide electrical pathways while the elastomeric material provides mechanical flexibility and cushioning. This composite approach allows the interface element to withstand compression and provide reliable electrical contact without the fragility of solid metal probes.
2Reliability
If vertical needle probes are used, then electrical contact is achieved, but assembly and replacement become complex
Solution Approach 1:
The patent merges the electrical conduction function and the mechanical support function into a single integrated elastomeric bearing structure. The conductive segments are embedded within the elastomeric matrix during manufacturing, creating a unified component that eliminates the need for separate probe assembly. This integration dramatically simplifies manufacturing and replacement while maintaining reliable electrical contact.
Solution Approach 2:
The elastomeric bearing structure provides self-alignment and self-cushioning through its inherent material properties. The elastomeric material naturally absorbs compression and maintains contact pressure, eliminating the need for complex mechanical adjustment mechanisms. This self-service capability simplifies the overall system design and assembly process.
3Force
If mechanical cushioning elements are used, then compression resistance is provided, but device complexity and cost increase
Solution Approach 1:
The patent changes the material parameter of the bearing from rigid mechanical elements to a flexible elastomeric material. This parameter change allows the material itself to provide compression resistance through its elastic properties rather than requiring separate mechanical cushioning elements. The elastomeric material can deform under compression and return to its original shape, providing sustained force resistance without adding complexity.
4Ease of manufacture
If photoresist layers are used as preliminary support, then conductor formation is enabled, but additional manufacturing steps are required
Solution Approach 1:
The patent uses photoresist layers as preliminary support structures during the conductor formation process. The photoresist layers are deposited and patterned before the conductive segments are formed, providing a template and support structure for the subsequent conductor deposition. This preliminary action enables precise conductor formation while the photoresist layers are later removed, leaving the desired conductor pattern embedded in the elastomeric matrix.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a cost-effective, reliable, and adaptable interface element with enhanced cushioning and structural integrity, suitable for testing devices with reduced pitches.
Implementation Method 1
a bearing of elastomeric material in which some metal conductors performing the probe function are embedded, wherein the bearing elasticity required to cushion the contacts
Implementation Method 2
each of said conductors comprises a plurality of conductive segments oriented in a different direction and overlapped in the vertical direction
Data Source
Figure 1~2
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Figure 6~7
AI summary
The present disclosure relates to a method for manufacturing an interface element (1) arranged to put a plurality of terminations of a device to be tested in contact with the corresponding channels of a testing head, comprising the steps of: arranging a planar lower support (3); depositing a first photoresist layer (2i) on said lower support (3); etching said first photoresist layer (2i) so as to form a plurality of through openings in said first photoresist layer (2i); filling said plurality of through openings with a conductive material so as to form at least one conductive segment (241); repeating the above steps up to reach a desired thickness, where the conductive segments which are contiguous to each other define a plurality of conductors; removing the photoresist layers; embedding said plurality of conductors in an elastomeric matrix.