Elastomeric Pad for Metal-Ceramic Substrate Clamping
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Solution Overview
Problem
Conventional clamping systems for metal-ceramic substrates during photolithographic processes apply mechanical stress, leading to particle detachment and subsequent incorrect exposures due to opaque particles and potential microcracks or mechanical imprints.
Innovation Solution
A device with a raised pad made of soft, elastically deformable materials, such as vulcanized rubber, that elevates the exposure cavity relative to the carrier, preventing particles from reattaching and allowing easy removal, while a vacuum ensures flatness and minimizes mechanical damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional clamping system is used to clamp down metal-ceramic substrates, then the substrate is held securely for exposure, but mechanical stress causes particles to detach and creates microcracks or mechanical imprints
Solution Approach 1:
The patent applies a flexible membrane (thin film) as the clamping surface that can deform elastically under vacuum pressure. This membrane distributes the clamping force uniformly across the substrate surface, preventing particle detachment and microcrack formation while maintaining secure holding during the exposure process
Solution Approach 2:
The patent changes the physical state and mechanical properties of the clamping surface from rigid to flexible by using an elastomeric material. This parameter change allows the material to conform to substrate variations and distribute stress, eliminating the harmful effects of conventional rigid clamping systems
2Reliability
If particles detach from the substrate during clamping, then they remain in the clamping system and cause incorrect exposures in subsequent cycles, but removing them requires system disassembly
Solution Approach 1:
The patent extracts the problematic area by creating a raised exposure cavity that is physically separated from the main clamping surface. Particles that detach during clamping fall into this isolated cavity rather than remaining on the active clamping surface, allowing them to be easily removed without disassembling the entire clamping system
Solution Approach 2:
The clamping system is segmented into distinct functional zones: the main clamping surface for holding substrates and the raised exposure cavity for particle collection. This segmentation allows independent handling of each zone, simplifying particle removal operations
3Manufacturing precision
If a rigid clamping surface is used to ensure flatness, then exposure quality is maintained, but mechanical stress on the substrate increases
Solution Approach 1:
The patent uses a flexible membrane that can be applied with uniform pressure to achieve substrate flatness during exposure. The membrane's flexibility allows it to conform to substrate variations without creating high stress concentrations, maintaining both exposure quality and substrate integrity
Solution Approach 2:
The flexible membrane acts as an intermediary between the rigid vacuum source and the substrate. It transmits the vacuum force uniformly while absorbing mechanical stress, preventing direct transmission of harmful forces to the substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces mechanical stress on metal-ceramic substrates, minimizes exposure errors, and prevents microcracks or mechanical imprints by keeping particles in a non-critical area, ensuring accurate and damage-free structuring.
Implementation Method 1
The metal-ceramic substrate to be structured is positioned on the pad and the vacuum, which acts on the metal-ceramic substrate through the openings of the pad, causes the metal-ceramic substrate to be clamped down and thus forms a sufficient flatness
Implementation Method 2
the pad used as the exposure cavity is raised relative to the carrier... consist in particular of a soft base material... vulcanized rubber with a hardness of 20 to 50 IRHD
Data Source
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AI summary
A device for the low-tensioning of metal-ceramic substrates is described, which is used in exposure systems for structuring metal-ceramic substrates. A further object of the present invention is a method for structuring metal-ceramic substrates using the device according to the invention, as well as its application.