Elastomeric Test Interface With Embedded Vias for Fine-Pitch Contacts

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Solution Overview

Problem

Existing testing head technologies face challenges with high production costs, fragility of probes, and difficulty in forming reduced pitches, necessitating complex assembly and replacement.

Innovation Solution

A method involving the use of elastomeric material with embedded metal conductors, where elasticity is achieved through a non-vertical conformation of the conductors, allowing for a spring-like structure formed by alternating vertical and horizontal segments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If vertical probes are used in testing heads, then contact precision is improved, but device complexity and fragility increase

Engineering Contradiction:
Improvecontact precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical vertical probe system with an elastomeric interface element that uses elastic deformation to provide contact pressure. The elastomeric material itself serves as the cushioning and contact mechanism, eliminating the need for complex mechanical probe assemblies with separate cushioning elements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention uses composite construction by embedding conductive elements within an elastomeric matrix. This composite structure combines the mechanical flexibility and cushioning properties of elastomers with the electrical conductivity needed for testing, creating a unified component that replaces multiple separate mechanical parts.

Inventive Principle:
Principle #40Composite materials

2Stability of the object's composition

If mechanical probes are used for cushioning, then contact stability is improved, but ease of manufacture deteriorates

Engineering Contradiction:
Improvecontact stabilityVSAvoidease of manufacture
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The patent merges the cushioning function and electrical conduction function into a single integrated elastomeric component. The conductive elements are embedded directly within the elastomeric matrix during manufacturing, creating a unified structure that provides both mechanical cushioning and electrical connectivity without requiring separate assembly of mechanical probes and cushioning elements.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If vertical probes are used, then manufacturing precision is improved, but loss of time increases

Engineering Contradiction:
Improvemanufacturing precisionVSAvoidloss of time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The elastomeric interface element is designed to be self-adjusting through its elastic properties. The material automatically adapts to contact pressure and deformation requirements without requiring complex mechanical adjustment mechanisms or precise manual assembly, thereby reducing manufacturing time while maintaining precision through the inherent elasticity of the material.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces costs, enhances structural and functional reliability, and improves adaptability in manufacturing, while providing effective cushioning without mechanical elements.

Implementation Method 1

a bearing of elastomeric material in which some metal conductors performing the probe function are embedded, wherein the bearing elasticity required to cushion the contacts is preferably ensured by a non-vertical conformation of the above conductors

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS20250355022A1Method for manufacturing an interface element with elastic properties provided with internal electric vias, in particular for connecting a device to be tested to a testing head, and interface element obtained with said method
Publication Date: 2025.11.20 MICROTEST SPA
  • US20250355022A1 patent drawing
  • US20250355022A1 patent drawing
  • US20250355022A1 patent drawing

AI summary

A method for manufacturing an interface element arranged to put a plurality of terminations of a device to be tested in contact with the corresponding channels of a testing head, the method including the steps of: arranging a planar lower support; depositing a first photoresist layer on the lower support; etching the first photoresist layer so as to form a plurality of through openings in the first photoresist layer; filling the plurality of through openings with a conductive material so as to form at least one conductive segment; repeating the above steps up to reach a desired thickness, where the conductive segments which are contiguous to each other define a plurality of conductors; removing the photoresist layers; and embedding the plurality of conductors in an elastomeric matrix.