Electret Diaphragm Sputtering Adhesion via Plasma Activation

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Solution Overview

Problem

Conventional methods for manufacturing electret loudspeakers face issues with the conductive material peeling off the dielectric film, leading to performance degradation and difficulties in mass production.

Innovation Solution

A method involving the use of vacuum tape or clamping fixtures to attach a dielectric film to a frame, followed by plasma processing to induce activating groups, and then forming a conductive material layer using sputtering, with subsequent corona charging to generate static charges, all while utilizing conveyers to expedite the process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional processes are used to manufacture electret diaphragm, then the manufacturing process is simple, but the conductive material is prone to come off the dielectric film

Engineering Contradiction:
Improvebond strength between conductive material and dielectric filmVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing plasma treatment on the dielectric film surface before depositing the conductive material. This preliminary surface modification creates activating groups that enhance the bond strength between the conductive material and dielectric film, preventing peeling while maintaining a controlled manufacturing process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by controlling plasma processing parameters (power, time, gas flow rate) to optimize the surface activation effect. By adjusting these parameters, the bond strength is enhanced without excessively complicating the manufacturing process, achieving a balance between reliability and process complexity.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If conventional processes are used to manufacture electret diaphragm, then the equipment requirements are minimal, but mass production is difficult to achieve

Engineering Contradiction:
Improvemass production capabilityVSAvoidequipment and process complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent implements continuity of useful action by integrating the plasma treatment and conductive material deposition into a continuous manufacturing process. The dielectric film undergoes plasma treatment followed immediately by conductive material deposition without interruption, enabling efficient mass production while managing equipment complexity through automated sequential processing.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The patent replaces traditional mechanical bonding methods with plasma-based chemical activation and controlled material deposition. This substitution enables more precise control over the bonding interface and facilitates automated mass production, addressing the productivity challenge while managing equipment complexity through modernization rather than mechanical complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Strength

If the dielectric film is stretched tautly over the frame, then the film tension is increased, but the film may be damaged during sputtering process

Engineering Contradiction:
Improvefilm tensionVSAvoidfilm damage during sputtering
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent applies periodic action by implementing interrupted sputtering cycles with cooling periods in between. The sputtering process is halted for at least 10 to 60 seconds after every 10 to 60 seconds of continuous sputtering to cool down the film, preventing thermal damage while maintaining sufficient film tension for the manufacturing process.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent employs beforehand cushioning by using vacuum tape or clamping fixtures to secure the dielectric film to the frame before sputtering. This preliminary fixation prevents film movement and reduces mechanical stress during the sputtering process, cushioning against potential film damage while maintaining necessary film tension.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method securely attaches the conductive material to the dielectric film, preventing peeling and enabling efficient mass production of electret diaphragms with improved performance by ensuring a strong bond and controlled processing parameters.

Implementation Method 1

the upper surface of the film is subjected to an oxygen or argon plasma process to induce activating groups thereon to facilitate the bond with a conductive material

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

a first conveyer is used to convey the frame to a metal sputtering apparatus so as to form a conductive material layer on the film, such as an aluminum layer or a gold layer

Methodology Applied
Scientific EffectSputtering: Sputtering

Implementation Method 3

A corona charging process is then performed to make the film become an electret diaphragm with long-lived static charges carried therein or thereon

Methodology Applied
Scientific EffectCorona discharge: Corona Discharge

Data Source

PatentUS8262824B2Method for manufacturing electret diaphragm
Publication Date: 2012.09.11 HTC CORP
  • US8262824B2 patent drawing
  • US8262824B2 patent drawing
  • US8262824B2 patent drawing

AI summary

A method for manufacturing electret diaphragms is provided. First, a dielectric film is attached to a frame by an adhesive material and a fastening element grips the peripheral area of the dielectric film on the frame. Afterward, the dielectric film is subjected to a metal sputtering process to form a conductive material layer thereon. Finally, the dielectric film is subjected to a polarizing process thereby forming an electret diaphragm.