Electrical Probe Alignment for Transparent Substrates
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Solution Overview
Problem
Conventional alignment methods for multi-layer articles with transparent or substantially transparent materials face challenges due to lack of optical contrast, making it difficult to align patterns optically, which can lead to performance degradation if not registered within specified tolerances.
Innovation Solution
The method involves using electrical measurements to identify the location of alignment structures on a substrate with poor optical contrast, employing a controller to measure electrical characteristics with a probe, and interpreting these measurements to align subsequent patterns accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If optical methods are used to identify alignment structures, then alignment precision can be achieved for opaque materials, but alignment becomes difficult or impossible for transparent or substantially transparent materials due to lack of optical contrast
Solution Approach 1:
The patent replaces optical detection methods with electrical measurement methods. Instead of using cameras or optical sensors to detect alignment structures, the system uses electrical probes to measure electrical characteristics (such as resistance, capacitance, or conductance) at different positions on the substrate. This substitution allows detection of alignment structures on transparent materials where optical methods fail due to lack of contrast.
Solution Approach 2:
The patent changes the detection parameter from optical properties (reflectivity, absorption, color) to electrical properties (resistance, capacitance, conductance). By measuring electrical characteristics rather than optical characteristics, the system can identify alignment structures on transparent materials. The alignment structures are designed to have different electrical characteristics than the surrounding substrate, enabling their detection through electrical measurements.
2Manufacturing precision
If alignment structures are placed at outside margins of the substrate, then angular registration is improved and margins can be removed in finished products, but the alignment structures may interfere with subsequent pattern formation or product design
Solution Approach 1:
The patent performs electrical measurement and identification of alignment structures before subsequent pattern formation. By using the electrical probe to locate alignment structures first, the system can then use this location information to guide subsequent printing or patterning operations, ensuring proper registration without the alignment structures interfering with the final product design.
Solution Approach 2:
The electrical probe acts as an intermediary between the alignment structures and the subsequent patterning process. It measures the electrical characteristics to identify alignment structure locations, and this information is then used to control the positioning of subsequent patterns, serving as a mediator that enables accurate registration without direct optical interference.
3Productivity
If successive patterned layers are formed on a single substrate, then multi-layer articles can be created efficiently, but pattern registration within specified tolerances becomes critical and performance degrades if misalignment occurs
Solution Approach 1:
The patent implements a feedback mechanism where electrical measurements are taken to identify the actual positions of alignment structures, and this information is fed back to control the positioning of subsequent patterning operations. The system measures the electrical characteristics, determines the location of alignment structures, and uses this information to adjust and control the formation of subsequent patterns, ensuring registration within specified tolerances.
Solution Approach 2:
The patent replaces optical feedback mechanisms with electrical measurement feedback. Instead of using optical sensors to detect alignment structures and provide feedback for registration, the system uses electrical probes to measure electrical characteristics and provide feedback information for controlling subsequent patterning, enabling accurate registration on transparent substrates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise alignment of patterns on substrates with transparent materials by utilizing electrical contrast, enabling effective registration even when optical methods fail, thus improving the performance of multi-layer devices and circuits.
Implementation Method 1
the alignment structure has a different magnitude of an electrical characteristic than the substrate
Data Source
AI summary
A method for forming a second pattern in registration with a first pattern on a substrate is disclosed. The method comprises providing the substrate having a first magnitude of an associated electrical characteristic and at least one alignment structure that is associated with a second magnitude of the electrical characteristic different from the first magnitude. A controller is used to control an electrical probe to measure the electrical characteristic at a plurality of positions proximate the substrate. The measured electrical characteristic corresponds to the alignment structure when the probe is proximate to the alignment structure and to the substrate when the probe is not proximate to the alignment structure. The measured electrical characteristics are used to identify a location of the alignment structure. The second pattern is formed so that it is in registration with the first pattern, based on the identified location of the alignment structure.