Electrical SPR Sensor Chip With Silicon Film Signal Intensification
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Solution Overview
Problem
Conventional surface plasmon resonance sensors face challenges in achieving high sensitivity, size reduction, and high throughput due to the need for optical systems and precise control of metal fine particles, which also affect sensor accuracy and sample oxidation.
Innovation Solution
An electricity measuring type surface plasmon resonance sensor chip with a prism, a silicon semiconductor film, and a plasmon resonance film electrode, where light is used to excite surface plasmon polaritons, allowing for direct measurement of current or voltage changes, enhancing sensitivity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical system is used to detect surface plasmon resonance angle changes, then detection capability is achieved, but the apparatus becomes expensive and large in size
Solution Approach 1:
The patent replaces the optical detection system with an electrical measurement system. Instead of using optical components to detect surface plasmon resonance angle changes, the invention uses a sensor chip with metal fine particles that generate electrical signals when exposed to light, allowing detection through electrical measurements rather than optical systems.
Solution Approach 2:
The invention changes the detection parameter from optical angle measurement to electrical signal measurement. By using metal fine particles that generate electrical responses when illuminated, the system transitions from measuring resonance angles optically to measuring electrical parameters directly.
2Measurement precision
If metal fine particles are used for localized surface plasmon resonance, then sensitivity enhancement is achieved, but precise control of size and arrangement is required
Solution Approach 1:
The patent employs a porous layer containing metal fine particles. This porous structure provides a matrix that naturally accommodates the particles, reducing the need for precise manual control of their size and arrangement while maintaining the sensitivity benefits of localized surface plasmon resonance.
Solution Approach 2:
The invention creates a composite structure combining a porous material with metal fine particles. This composite approach allows the porous matrix to support the particles in a controlled yet flexible manner, achieving both sensitivity enhancement and ease of manufacturing.
3Ease of operation
If conventional sensor designs are used, then basic detection function is achieved, but sensor accuracy and sensitivity are insufficient
Solution Approach 1:
The patent merges multiple functions into a single sensor chip structure. The chip integrates the metal fine particles, porous layer, and substrate into one unit that simultaneously provides structural support, sensitivity enhancement through localized surface plasmon resonance, and electrical signal generation, thereby improving both accuracy and ease of operation.
Solution Approach 2:
The porous layer acts as an intermediary between the metal fine particles and the surrounding environment. This intermediary structure facilitates both the optical interaction needed for plasmon resonance and the electrical signal transmission, enhancing both sensitivity and operational ease.
4Productivity
If higher throughput is achieved by processing multiple samples, then productivity increases, but integration becomes more difficult
Solution Approach 1:
The patent employs a sensor chip array structure where multiple identical sensor chips are arranged in an array. Each chip can process one sample independently, allowing simultaneous processing of multiple samples (high throughput) while maintaining simple, modular design that facilitates integration.
Solution Approach 2:
The sensor chip design is universal and can be replicated across multiple chips in an array. Each chip performs the same detection function, allowing the system to handle multiple samples simultaneously without increasing the complexity of individual chip design or integration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves higher sensitivity and easier miniaturization with improved throughput, allowing for accurate detection of refractive index changes and sample concentration without affecting the sample, using a silicon semiconductor film to intensify the electric signal.
Implementation Method 1
light is used to excite surface plasmon polaritons, allowing for direct measurement of current or voltage changes
Implementation Method 2
Surface plasmon resonance (SPR) is a state in which free electrons are in collective oscillatory motion (plasma oscillation) on a metal surface
Implementation Method 3
when the light having passed through the prism totally reflects between the plasmon resonance film electrode and the semiconductor film
Data Source
AI summary
An electricity measuring type surface plasmon resonance sensor includes: a plasmon resonance intensifying sensor chip in which a prism and a sensor chip including an electrode, a silicon semiconductor film, and a plasmon resonance film electrode arranged in this order are arranged in an order of the prism, the electrode, the silicon semiconductor film, and the plasmon resonance film electrode; and an electric measuring apparatus which directly measures a current or voltage from the electrode and the plasmon resonance film electrode.


