Electro-chemo-optical Devices Using Oxygen Vacancy Control

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Solution Overview

Problem

Existing reconfigurable active optical components face challenges in achieving flexible, broad spectral tunability, rapid response times, and compatibility with standard clean room processes, particularly in thermally induced phase changes and lithium intercalation methods.

Innovation Solution

The development of reprogrammable electro-chemo-optical devices using metal oxide films with complex refractive indices that vary with oxygen vacancy concentration, enabled by applying bias voltages across electrodes to control oxygen vacancy distribution and polarization, allowing for dynamic modulation of optical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If thermally induced phase changes in chalcogenide materials are used, then spectral tunability is achieved, but response time is slow and power consumption is high

Engineering Contradiction:
Improvespectral tunabilityVSAvoidresponse time
Core Design Contradiction:
Adaptability or versatilityVSSpeed

Solution Approach 1:

The patent changes the physical parameter used for optical modulation from thermal phase changes to electrochemical oxygen vacancy concentration changes. By applying voltage to control oxygen vacancy distribution in metal oxide films, the complex refractive index is modulated directly without thermal heating, achieving both spectral tunability and fast response times

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the thermal field (heat-induced phase changes) with an electrochemical field (voltage-controlled oxygen vacancy migration). This substitution eliminates the need for thermal heating while achieving optical property modulation, thereby reducing power consumption and increasing response speed

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If thermally induced phase changes in chalcogenide materials are used, then spectral tunability is achieved, but power consumption is high

Engineering Contradiction:
Improvespectral tunabilityVSAvoidpower consumption
Core Design Contradiction:
Adaptability or versatilityVSUse of energy by moving object

Solution Approach 1:

The patent replaces thermal field with electrochemical field, substituting heat-driven phase changes with voltage-driven oxygen vacancy migration. This eliminates continuous thermal heating requirements, significantly reducing power consumption while maintaining spectral tunability through electrochemical control

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the control parameter from temperature to voltage. By controlling oxygen vacancy concentration through applied voltage rather than thermal heating, the system achieves optical modulation with minimal power consumption, as electrochemical processes require far less energy than thermal phase transitions

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If lithium intercalation into oxide materials is used, then reconfigurability is achieved, but compatibility with standard clean room processes is poor

Engineering Contradiction:
ImprovereconfigurabilityVSAvoidcompatibility with standard clean room processes
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent changes the intercalation mechanism from lithium ions to oxygen vacancies. By controlling oxygen vacancy concentration through voltage application in metal oxide films, the system achieves reconfigurability using electrochemical processes that are compatible with standard semiconductor manufacturing and clean room processes, unlike lithium intercalation which requires specialized handling

Inventive Principle:
Principle #35Parameter changes

4Adaptability or versatility

If ion blocking electrodes are used to create oxygen vacancy gradient, then optical property modulation is achieved, but device structure complexity increases

Engineering Contradiction:
Improveoptical property modulationVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by using ion-blocking electrodes only at specific locations where oxygen vacancy confinement is needed. The electrodes create localized oxygen vacancy gradients in the metal oxide film without requiring complete structural redesign, achieving optical property modulation while maintaining relatively simple device architecture

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These devices offer gradual control of optical properties, broader spectral tunability, compatibility with standard clean room processes, and faster response times, operating from cryogenic to high temperatures, enhancing flexibility and reliability.

Implementation Method 1

reprogrammable electro-chemo-optical devices using metal oxide films with complex refractive indices that vary with oxygen vacancy concentration

Methodology Applied
Scientific EffectElectro-chemo-optical effect:

Implementation Method 2

Applying a bias voltage across the metal oxide film using the first electrode and the second electrode creates a gradient in the oxygen vacancy concentration, thus inducing an oxygen vacancy polarization

Methodology Applied
Scientific EffectOxygen vacancy polarization:

Implementation Method 3

When a bias voltage is applied across the ionic conductor using the first electrode and the second electrode, an exchange of oxygen vacancies (or equivalently oxygen ions) occurs between the metal oxide film and an oxygen source coupled to the optical device through the ionic conductor and the second electrode

Methodology Applied
Scientific EffectElectrochemical pumping:

Implementation Method 4

the ionic conductor and the second electrode are ion conducting

Methodology Applied
Scientific EffectIon conduction: Conduction (electrical)

Implementation Method 5

Applying a bias voltage across the metal oxide film creates a gradient in the oxygen vacancy concentration

Methodology Applied
Scientific EffectElectrophoresis: Electrophoresis

Data Source

PatentUS11048136B2Reprogrammable electro-chemo-optical devices and methods for using the same
Publication Date: 2021.06.29 MASSACHUSETTS INST OF TECH
  • US11048136B2 patent drawing
  • US11048136B2 patent drawing
  • US11048136B2 patent drawing

AI summary

Reconfigurable, active optical components can flexibly manipulate light. One example of these components is an electro-chemo-optical device that utilizes a metal oxide film with a complex refractive index that varies as a function of an oxygen vacancy concentration. The optical device may include a metal oxide film, a first electrode, and a second electrode. The first electrode and the second electrode may be used to supply a bias voltage to induce a change in the oxygen vacancy concentration in order to change the optical properties (absorbance, transmittance, and/or reflectance) of the optical device. The magnitude and spatial distribution of the oxygen vacancy concentration may be altered to affect the optical properties of the optical device. In some designs, the optical device may also include an ionic conductor and oxygen source to supply/receive oxygen ions to/from the metal oxide film.