Composite Electro-Optic Substrate With Rough Interface for RF Resonance
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Solution Overview
Problem
Conventional electro-optic elements face electromagnetic wave resonance issues due to thick support substrates, which interfere with normal operation, particularly in radio frequency bands, leading to signal fluctuations.
Innovation Solution
Implementing a composite substrate with a rough interface between the low-refractive-index layer and the support substrate, and a smooth interface between the electro-optic crystal substrate and the low-refractive-index layer to refract and reflect electromagnetic waves, reducing resonance while minimizing light diffusion and absorption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ITO is used as the transparent electrode to achieve high transparency and conductivity, then the electro-optical element can be manufactured, but the bending resistance becomes insufficient when the substrate is bent to a small radius
Solution Approach 1:
The patent applies composite materials by forming a stacked structure of ITO and high-k dielectric layers. This composite structure provides both the electrical conductivity and transparency of ITO while the high-k dielectric layer contributes to mechanical strength and bending resistance, resolving the contradiction between maintaining electrode functionality and improving structural durability under small curvature conditions.
Solution Approach 2:
The transparent electrode is segmented into multiple thin layers (ITO and high-k dielectric layers) rather than using a single thick layer. This segmentation allows each layer to be optimized for its specific function while collectively providing enhanced mechanical properties including bending resistance, without compromising the overall transparency and conductivity performance.
2Reliability
If a stacked structure of ITO and high-k dielectric layers is formed to improve bending resistance, then mechanical strength increases, but contact resistance may increase due to multiple interfaces
Solution Approach 1:
The patent controls the thickness parameters of each layer in the stacked structure. By optimizing the thickness of ITO layers and high-k dielectric layers, the design maintains sufficient electrical conductivity while achieving the desired mechanical strength. The parameter optimization ensures that contact resistance does not increase significantly despite the multi-layer structure.
3Ease of manufacture
If conventional sputtering is used to form ITO, then the process is simple and inexpensive, but the ITO layer becomes brittle and prone to cracking under bending stress
Solution Approach 1:
The patent combines conventionally sputtered ITO layers with high-k dielectric layers to create a composite structure. This approach maintains the manufacturing simplicity and cost-effectiveness of conventional sputtering while the composite structure as a whole achieves the required bending strength, as the high-k dielectric layer provides mechanical reinforcement to the inherently brittle ITO.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses electromagnetic wave resonance and signal ripples, enabling stable operation of electro-optic elements in high-frequency applications by varying wave propagation paths and maintaining light confinement within the electro-optic crystal substrate.
Implementation Method 1
a sputtering device, a plasma CVD device, or the like is used to form the transparent electrode
Implementation Method 2
an annealing device is used to adjust the crystallinity of the transparent electrode or eliminate organic substances contained therein
Data Source
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AI summary
A composite substrate for an electro-optic element is disclosed. The composite substrate includes: an electro-optic crystal substrate having an electro-optic effect; a low-refractive-index layer being in contact with the electro-optic crystal substrate and having a lower refractive index than the electro-optical crystal substrate; and a support substrate bonded to the low-refractive-index layer at least via a bonding layer. A plurality of interfaces located between the low-refractive-index layer and the support substrate includes at least one rough interface having a roughness that is larger than a roughness of an interface between the electro-optic crystal substrate and the low-refractive-index layer.