Electro-Optical Device Contact Plug Relay Layer Integration
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Solution Overview
Problem
Existing electro-optical devices face challenges in achieving both reliable electrical connections and optimal optical performance, particularly due to the increased aspect ratio of contact holes affecting the positioning of relay electrodes between lenses, which can impact the reliability of electrical connections and optical performance.
Innovation Solution
The electro-optical device incorporates a transistor, a pixel electrode, a lens layer, a first relay layer, and a connecting member where a part of the connecting member is inside the relay layer, ensuring reliable electrical connections while maintaining optical performance by optimizing the structure of the contact holes and relay layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a relay electrode is formed between adjacent lenses at a position shallower than the bottom of a concave surface for a lens, then reliability of electrical connection is improved, but optical performance of the lens may be affected
Solution Approach 1:
The patent resolves the contradiction by transitioning from a two-dimensional planar arrangement to a three-dimensional spatial configuration. The first connecting member extends vertically through the first relay layer to reach the pixel electrode, while the second connecting member connects the lens to the first relay layer. This multi-layer vertical architecture allows electrical connections and optical components to coexist without spatial interference, maintaining both electrical reliability and optical performance.
Solution Approach 2:
The patent applies nesting by placing the first connecting member inside the first relay layer structure. The connecting member is embedded within the relay layer, allowing the relay layer to maintain its optical function while the connecting member provides the electrical connection pathway. This nested configuration enables both components to fulfill their respective functions without compromising each other's performance.
2Reliability
If the depth of contact hole is increased to improve electrical connection, then reliability of electrical connection is improved, but aspect ratio increases causing manufacturing difficulties
Solution Approach 1:
The patent divides the electrical connection pathway into multiple segments: the first connecting member connects the first relay layer to the pixel electrode, while the second connecting member connects the lens to the first relay layer. This segmentation allows each connecting member to have a manageable depth and aspect ratio, avoiding the manufacturing difficulties associated with single deep contact holes while ensuring reliable electrical connections through the stacked configuration.
Data Source
AI summary
A liquid crystal device includes a transistor, a pixel electrode provided corresponding to the transistor, a lens layer provided in a layer between the transistor and the pixel electrode, a relay layer provided in a layer between the transistor and the lens layer, and a contact plug configured to electrically connect the relay layer and the pixel electrode, and a part of the contact plug is provided in the relay layer.