Electro-Optical Device Insulating Layer Impurity Barrier

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Solution Overview

Problem

In electro-optical devices like liquid crystal projectors, impurities in the light-shielding film can diffuse into the base insulating layer, affecting the performance of thin-film transistors (TFTs), particularly when the insulating layer contains high amounts of impurities.

Innovation Solution

The implementation of a translucent substrate with a light-shielding body made of metal, sandwiched between the substrate and the TFT, and two insulating layers with a higher content of a predetermined element in the first insulating layer compared to the second, to reduce the impact of impurities on the TFT performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a light-shielding film is disposed below the TFT via a base insulating layer, then the amount of light incident on the TFT is reduced, but impurities in the light-shielding film can diffuse into the base insulating layer and adversely affect the TFT properties

Engineering Contradiction:
Improvelight incident on TFTVSAvoidTFT properties
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

An intermediate insulating layer is introduced between the light-shielding film and the base insulating layer. This intermediate layer acts as a barrier that prevents impurities from the light-shielding film from diffusing into the base insulating layer, while still allowing the light-shielding function to operate effectively.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The single base insulating layer structure is segmented into multiple insulating layers (base insulating layer and intermediate insulating layer). This segmentation allows the system to simultaneously achieve light-shielding functionality and impurity isolation, resolving the contradiction between reducing light incidence and preventing impurity diffusion.

Inventive Principle:
Principle #1Segmentation

2Device complexity

If one base insulating layer is interposed between the TFT and the light-shielding film, then the structure is simplified, but the TFT is more susceptible to impurities that have diffused into the base insulating layer

Engineering Contradiction:
Improveinsulating layer structureVSAvoidimpurity susceptibility of TFT
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The intermediate insulating layer serves as a protective intermediary that specifically targets and blocks impurity diffusion pathways. This adds minimal structural complexity while effectively reducing the TFT's susceptibility to harmful impurities.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The intermediate insulating layer is strategically positioned only where impurity diffusion is most critical - between the light-shielding film and the base insulating layer. This localized approach addresses the specific harmful factor without unnecessarily complicating the entire device structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the light-shielding properties and reduces the adverse effects of impurities on TFTs, maintaining optimal performance and efficiency in electro-optical devices.

Implementation Method 1

a first insulating layer having insulating properties and disposed between the light-shielding body and the transistor, the first insulating layer being in contact with the light-shielding body

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Data Source

PatentUS11429004B2Electro-optical device having predetermined element in insulating layers, electronic apparatus and method for manufacturing electro-optical device
Publication Date: 2022.08.30 SEIKO EPSON CORP
  • US11429004B2 patent drawing
  • US11429004B2 patent drawing
  • US11429004B2 patent drawing

AI summary

An electro-optical device includes a translucent substrate, a transistor, a light-shielding body having light-shielding properties, including a metal and disposed between the substrate and the transistor, a first insulating layer having insulating properties and disposed between the light-shielding body and the transistor, the first insulating layer being in contact with the light-shielding body, and a second insulating layer having insulating properties and disposed between the first insulating layer and the transistor, the second insulating layer being in contact with the first insulating layer. A content of a predetermined element that is not an element of a main component in the first insulating layer is higher than a content of the predetermined element in the second insulating layer.