Electro-optical Device Spring Tip Layout for Expanded Mirror Pivot Range
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Solution Overview
Problem
The existing digital micromirror device structure limits the layout flexibility of spring tips, which regulate the pivot range of mirrors, leading to constraints in expanding the pivot range and positioning of elevated address electrodes.
Innovation Solution
The electro-optical device positions spring tips to protrude from beam portions that do not overlap the mirror in plan view, allowing for increased layout freedom and preventing interference with elevated address electrodes, while maintaining effective pivot range regulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If spring tips are provided at beam portions that overlap the mirror in plan view, then the pivot range of the mirror can be regulated, but the layout freedom is significantly limited and the pivot range cannot be expanded
Solution Approach 1:
The spring tips are positioned to protrude from beam portions located in a region that does not overlap the mirror in plan view, utilizing the third dimension (height) to achieve the same regulatory function while avoiding planar overlap. This dimensional transition resolves the conflict between pivot range regulation and layout freedom.
2Reliability
If spring tips are provided at beam portions that overlap the mirror in plan view, then the pivot range can be regulated, but the positioning of elevated address electrodes is constrained
Solution Approach 1:
By relocating the spring tips to protrude from beam portions in a non-overlapping region, the patent creates sufficient planar space for elevated address electrodes to be positioned optimally, eliminating the constraint while preserving pivot range regulation through the dimensional transition.
3Reliability
If the mirror is brought into abutment against spring tips at beam portions overlapping the mirror, then pivot range is regulated, but the pivot range cannot be expanded
Solution Approach 1:
The spring tips protrude from beam portions positioned in a region that does not overlap the mirror in plan view, allowing the mirror to pivot through a larger angular range before contacting the spring tips, thereby expanding the pivot range while maintaining reliable regulation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the degrees of freedom in spring tip layout, expands the mirror's pivot range, and allows for wider placement of elevated address electrodes without obstruction, improving the overall performance of the electro-optical device.
Implementation Method 1
a torsion hinge being positioned between the mirror and the substrate, and supporting the mirror such that the mirror is pivotable about an axis
Implementation Method 2
a spring tip protruding from the beam portion toward a position that overlaps the mirror in plan view, and regulates a pivot range of the mirror
Implementation Method 3
an address electrode being provided between the mirror and the substrate at a position that overlaps the mirror in plan view, and supplying an electrostatic force between the address electrode and the mirror to pivot the mirror about the axis
Data Source
AI summary
An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, and a torsion hinge being positioned between the mirror and the substrate and pivotably supporting the mirror. The electro-optical device includes beam portions being disposed between the mirror and the substrate at positions that do not overlap the mirror in plan view, and being supported by the substrate while being spaced away from the mirror and the substrate. Spring tips that regulate a pivot range of the mirror protrude from the beam portions toward positions that overlap the mirror in plan view.