Electro-optical Apparatus Stepped Contact Holes
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Solution Overview
Problem
The existing electro-optical apparatuses face challenges in processing contact holes with high aspect ratios, which are necessary due to thick lens layers, leading to increased processing time and difficulty.
Innovation Solution
The electro-optical apparatus includes a first substrate with a pixel electrode, a peripheral electrode, a transistor, and relay electrodes, along with lens forming layers and contact holes, where conductive members are used to electrically couple the electrodes, optimizing the structure to reduce processing complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a contact hole with high aspect ratio is formed to extend through the thick lens layer, then the coupling member can electrically couple the pixel electrode and transistor, but the processing time increases and manufacturing difficulty increases
Solution Approach 1:
The patent divides the single thick contact hole into multiple smaller contact holes formed in separate lens layers. The first contact hole extends through the first lens layer, and the second contact hole extends through the second lens layer, creating a stepped configuration that reduces the aspect ratio of each individual contact hole while maintaining overall electrical connectivity.
Solution Approach 2:
The patent transitions from a single-dimensional vertical contact hole through the entire lens assembly to a multi-dimensional stepped structure with contact holes at different depths and lateral positions. This dimensional change allows each contact hole to be formed more easily while collectively achieving the same electrical coupling function.
2Reliability
If a contact hole with high aspect ratio is formed to extend through the thick lens layer, then the coupling member can electrically couple the pixel electrode and transistor, but the processing complexity increases
Solution Approach 1:
The patent segments the manufacturing process into distinct steps for forming contact holes in different lens layers. The first contact hole is formed through the first lens layer, and the second contact hole is formed through the second lens layer, making each etching step simpler and more manageable than forming a single high aspect ratio contact hole.
Solution Approach 2:
The patent performs preliminary actions by forming the first contact hole and first lens layer before forming the second contact hole and second lens layer. This sequential approach allows each step to be optimized independently and simplifies the overall manufacturing process compared to forming a single deep contact hole.
3Reliability
If the lens layer is made thick to provide proper lens function, then the optical performance is improved, but the contact hole aspect ratio increases making processing more difficult
Solution Approach 1:
The patent segments the total lens thickness into two separate lens layers, each with its own contact hole. This allows the optical function to be distributed across multiple thinner layers rather than concentrated in one thick layer, reducing the aspect ratio of individual contact holes while maintaining the required optical performance.
Solution Approach 2:
The patent uses a stepped, multi-level structure where lens layers and contact holes are arranged at different vertical and lateral positions. This dimensional arrangement allows thick optical functionality to be achieved without requiring proportionally deep contact holes, as the contact holes access electrodes at different levels.
Data Source
AI summary
An electro-optical apparatus includes a pixel electrode, a peripheral electrode, a transistor between the pixel electrode and a base, a relay layer between the pixel electrode and the transistor, a relay layer between the peripheral electrode and the base, a lens forming layer provided between the pixel electrode and the relay layer and including a lens surface and a contact hole, a lens forming layer provided between the peripheral electrode and the relay layer and including a lens surface and a contact hole, a contact plug provided in the contact hole and electrically coupling the pixel electrode and the relay layer, and a contact plug provided in the contact hole and electrically coupling the peripheral electrode and the relay layer.