Electro-Optical Device Wiring Stack for Light-Absorption Heat Control
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Solution Overview
Problem
Existing electro-optical devices using titanium nitride for light absorption in contact holes generate heat due to light absorption, leading to potential thermal issues.
Innovation Solution
Implementing a layered structure for wiring lines and electrodes with a first layer having high light reflectance, a second layer with lower reflectance, and a third layer with higher reflectance, strategically positioned to minimize light absorption and heat generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If titanium nitride is used as an electrolytic corrosion prevention layer in contact holes, then corrosion protection is improved, but heat generation increases due to light absorption
Solution Approach 1:
The contact hole is divided into multiple layers with different materials: a first layer (aluminum) for electrical connection, a second layer (titanium nitride) for corrosion protection, and a third layer (aluminum or other reflective material) for heat reflection. This segmentation allows each layer to perform its specific function while collectively solving both corrosion protection and heat generation problems.
Solution Approach 2:
The contact hole employs a composite structure combining aluminum, titanium nitride, and other reflective materials. This composite material approach enables simultaneous achievement of electrical conductivity, corrosion resistance, and thermal management by leveraging the properties of each material in the composite structure.
2Reliability
If a stacked structure is adopted in the entire region of the contact hole, then corrosion protection is improved, but light absorption and heat generation increase
Solution Approach 1:
The reflective property is localized to specific regions where heat generation is problematic. The third layer with high light reflectance is positioned in regions where light absorption would cause excessive heat, while the titanium nitride layer provides corrosion protection where needed. This local differentiation optimizes both corrosion protection and thermal management.
Solution Approach 2:
The patent converts the harmful effect of light absorption into a beneficial one by strategically positioning reflective layers. Instead of preventing light absorption entirely, the design uses selective reflection to redirect light away from heat-generating regions, transforming the potential harm of light into a useful cooling effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The layered structure effectively reduces heat generation within the device by reflecting light, enhancing electrical coupling reliability and preventing electrolytic corrosion.
Implementation Method 1
the first layer has light reflectance and is disposed closer to the transistor than the second layer and the third layer
Implementation Method 2
when titanium nitride absorbs light, there is a problem that heat is likely to be generated inside a substrate
Data Source
AI summary
An electro-optical device includes a pixel electrode, a first wiring line including a first layer, a second layer, and a third layer, a transistor at least partially overlapping the first wiring line in plan view, and a data line provided in a layer between the first wiring line and the transistor, at least a portion of the data line overlapping the first wiring line in plan view, and electrically coupled to the pixel electrode via the transistor, in which the first layer has light reflectance and is disposed closer to the transistor than the second layer and the third layer, the second layer is provided between the first layer and the third layer and has light reflectance lower than the first layer, and the third layer has light reflectance higher than the second layer.