Electrochemical Cell Structure with Integrated Electrodes
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Solution Overview
Problem
In semiconductor manufacturing, electrochemical cells face issues such as poor bonding and alignment errors, especially when the cell size is reduced, due to increased potential drop and ion motion inefficiencies caused by the distance between external and internal electrodes.
Innovation Solution
The structure and manufacture method of an electrochemical unit involve an array of electrochemical cells with a substrate, first and second metal layers, polymer layers, and electrodes, where the second electrode is integrated onto the polymer layer to reduce the distance between electrodes, improve potential drop, and enhance ion motion, while a protection layer is formed around the cavity to address bonding and alignment issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If an external-linking external electrode is used to connect to internal electrodes, then the electrochemical cell structure is simpler to manufacture, but the distance between electrodes increases causing potential drop and reduced ion motion efficiency
Solution Approach 1:
The patent merges the external electrode directly with the internal electrode structure by forming the second electrode on the polymer layer that is adjacent to the first electrode on the substrate. This integration eliminates the need for external linking wires and reduces the distance between electrodes, thereby improving the electrode field quality and ion motion efficiency while maintaining manufacturing simplicity.
Solution Approach 2:
The patent transitions from a traditional external-linking three-dimensional connection to a planar two-dimensional integration where the first and second electrodes are positioned on the same substrate plane. This dimensional change reduces the path length for ion motion and minimizes solution resistance, thereby reducing potential drop while keeping the manufacturing process straightforward.
2Reliability
If the distance between external and internal electrodes is shortened, then potential drop is reduced and ion motion is enhanced, but bonding and alignment errors become more critical in miniaturized cells
Solution Approach 1:
The patent segments the electrode structure into multiple discrete components: the first electrode formed on the substrate, the polymer layer as a separate intermediate component, and the second electrode formed on the polymer layer. This segmentation allows each component to be manufactured and positioned independently with standard precision, reducing the cumulative alignment errors that would affect miniaturized cells with integrated electrode structures.
Solution Approach 2:
The patent introduces the polymer layer as an intermediary component between the first and second electrodes. This intermediary layer serves as a positioning reference and buffer that accommodates manufacturing tolerances, thereby reducing the impact of bonding and alignment errors on the final electrode configuration while maintaining the shortened electrode distance needed for reduced potential drop.
3Device complexity
If the electrochemical cell size is reduced for miniaturization, then device complexity is reduced and integration is improved, but bonding poor and alignment errors become more serious
Solution Approach 1:
The patent makes the polymer layer serve multiple functions: it acts as an insulating layer, a positioning reference for electrode alignment, a mechanical support structure, and a separator between the first and second electrodes. This multi-functionality reduces the need for additional components in miniaturized cells, thereby maintaining low device complexity while improving bonding and alignment accuracy through the polymer layer's reference and support functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces potential drop, increases electric current, and improves bonding and alignment by shortening the electrode distance, allowing for more accurate measurement of impedance variations and substance analysis through the fine pore, thus enhancing the electrochemical cell's performance and reliability.
Implementation Method 1
a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode
Implementation Method 2
An electrochemical cell is formed by ion motion in a solution between an anode and a cathode, or electron movement in external metal wires between the anode and the cathode
Data Source
AI summary
A structure of an electrochemical unit includes a substrate, a first metal layer disposed on the substrate, and an array of electrochemical cells disposed on the first metal layer. The array of the electrochemical cells includes a plurality of electrochemical cells. Each of the electrochemical cells includes the first metal layer disposed on the substrate, a first electrode disposed on the first metal layer, a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode. A second metal layer is disposed on the polymer layer, and a second electrode is disposed on the second metal layer. A pore is constituted between the polymer layers of every the two electrochemical cells. A cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore.