Electrochemical Fin Memory Cell for Fast Ion Exchange at Small Scale

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Solution Overview

Problem

As the integration density of semiconductor memory devices increases, there is a need to reduce the size of electrochemical memory cells while maintaining an accurate resistance ratio and rapid operation characteristics.

Innovation Solution

The electrochemical memory cell incorporates an electrochemical fin structure with a protruded channel, a gate that overlaps with the channel, and an interface layer that controls ion exchanges based on gate voltage, enabling rapid and accurate memory operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the size of electrochemical memory cell is reduced to increase integration density, then integration density is improved, but operation speed and resistance ratio accuracy deteriorate

Engineering Contradiction:
Improvememory cell sizeVSAvoidoperation speed
Core Design Contradiction:
Area of stationary objectVSSpeed

Solution Approach 1:

The patent transitions from a planar 2D channel structure to a three-dimensional fin-shaped channel structure that protrudes upward. This vertical dimensionality change increases the effective channel surface area without increasing the planar footprint, thereby maintaining rapid ion exchange performance while reducing the overall memory cell area for higher integration density.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The gate electrode is divided into multiple segments (first gate electrode and second gate electrode) that can be independently controlled. This segmentation allows for optimized voltage application across different regions of the fin channel, improving resistance ratio accuracy and enabling precise control of ion exchange even in the reduced-size structure.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If the size of electrochemical memory cell is reduced to increase integration density, then integration density is improved, but resistance ratio accuracy deteriorates

Engineering Contradiction:
Improvememory cell sizeVSAvoidresistance ratio accuracy
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The gate electrode is divided into multiple segments (first gate electrode and second gate electrode) that can be independently controlled. This segmentation allows for optimized voltage application across different regions of the fin channel, improving resistance ratio accuracy and enabling precise control of ion exchange even in the reduced-size structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the fin channel are subjected to different gate voltages through the segmented gate electrodes. This local quality control enables precise manipulation of ion exchange in specific channel regions, ensuring accurate resistance ratio control despite the overall reduction in memory cell size.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If conventional planar channel structure is used, then manufacturing is simpler, but ion exchange speed is slower

Engineering Contradiction:
Improvestructure fabrication simplicityVSAvoidion exchange speed
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The patent transitions from a planar 2D channel structure to a three-dimensional fin-shaped channel structure that protrudes upward. This vertical dimensionality change increases the effective channel surface area without increasing the planar footprint, thereby maintaining rapid ion exchange performance while reducing the overall memory cell area for higher integration density.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances integration density and operation speed, achieving rapid ion exchange and low power consumption, thereby improving the performance of neural network memory devices.

Implementation Method 1

The electrochemical memory cell may perform a memory operation by an ion exchange with a channel in accordance with a gate voltage (or a gate current).

Methodology Applied
Scientific EffectIon exchange: Ion Exchange

Implementation Method 2

The interface layer may be formed between the protrusion surface of the electrochemical channel and the gate. The interface layer may control ion exchanges for memory operations between the gate and the electrochemical channel based on a gate voltage.

Methodology Applied
Scientific EffectElectrochemical reaction: Electrolysis

Implementation Method 3

The electrolyte layer may selectively provide the ions to the channel region through both sidewalls and the upper surface of the channel region based on a gate voltage.

Methodology Applied
Scientific EffectIon transport: Ion Exchange

Implementation Method 4

The electrochemical fin structure may be protruded from a surface of a lower layer. The gate may be overlapped with a channel region of the electrochemical fin structure.

Methodology Applied
Scientific EffectSurface area enhancement for ion exchange: Ion Exchange

Data Source

PatentUS20250169082A1Electrochemical memory cell and neural network memory including the same
Publication Date: 2025.05.22 SK HYNIX INC
  • US20250169082A1 patent drawing
  • US20250169082A1 patent drawing
  • US20250169082A1 patent drawing

AI summary

An electrochemical memory cell may include an electrochemical channel, a gate and an interface layer. The electrochemical channel may include a protruded surface having a fin-shape. The gate may be overlapped with the protruded surface of the electrochemical channel. The interface layer may be formed between the protruded surface of the electrochemical channel and the gate. The interface layer may control ion exchanges for memory operations between the gate and the electrochemical channel based on a gate voltage.