Electrochemical Unit Electrode Integration for Ion Motion
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Solution Overview
Problem
In semiconductor manufacturing, electrochemical cells with external-linking electrodes face issues of poor bonding and alignment errors due to increased distance between electrodes, leading to potential drops and reduced ion motion, which are exacerbated when cell sizes are reduced.
Innovation Solution
A structure and manufacture method for an electrochemical unit featuring a substrate with a first metal layer, an array of electrochemical cells, and a polymer layer that integrates the second electrode, reducing the distance between electrodes and improving potential drops, while also forming patterned material layers and pores to enhance ion motion and bonding accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an external-linking external electrode is adopted to connect to internal electrodes, then the electrode connection is established, but the distance between electrodes increases causing potential drop and reduced ion motion
Solution Approach 1:
The patent merges the external electrode directly with the internal electrode structure on the chip, eliminating the need for external-linking connections. This integration reduces the distance between electrodes while maintaining reliable electrical connection, thereby reducing potential drop and enhancing ion motion efficiency.
Solution Approach 2:
The patent transitions from a three-dimensional external-linking electrode configuration to a planar two-dimensional electrode arrangement on the chip surface. This dimensional change allows electrodes to be positioned closer together in the same plane, reducing the effective distance for ion motion while maintaining connection reliability.
2Volume of moving object
If the size of the electrochemical cell is reduced, then the device compactness is improved, but bonding quality and alignment accuracy deteriorate
Solution Approach 1:
The patent segments the electrochemical cell into multiple smaller functional units or modules, each with its own electrode structure. This segmentation allows for standardized fabrication processes that maintain bonding and alignment accuracy even as the overall device size is reduced, since each segment can be manufactured and assembled with controlled precision.
Solution Approach 2:
The patent changes the geometric parameters of the electrode structures and bonding interfaces to optimize for smaller cell sizes. By adjusting parameters such as electrode thickness, bonding pad dimensions, and inter-electrode spacing, the design maintains manufacturing precision while achieving compact form factor.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces potential drops, improves ion motion, and enhances bonding and alignment accuracy, increasing electric current and allowing for better detection of fine substances through impedance variation analysis.
Implementation Method 1
a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode
Implementation Method 2
An electrochemical cell is formed by ion motion in a solution between an anode and a cathode, or electron movement in external metal wires between the anode and the cathode
Implementation Method 3
the electrode field between the electrodes also can be improved to enhance ion motion resulting in electric current increasing
Data Source
AI summary
A structure of an electrochemical unit includes a substrate, a first metal layer disposed on the substrate, and an array of electrochemical cells disposed on the first metal layer. The array of the electrochemical cells includes a plurality of electrochemical cells. Each of the electrochemical cells includes the first metal layer disposed on the substrate, a first electrode disposed on the first metal layer, a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode. A second metal layer is disposed on the polymer layer, and a second electrode is disposed on the second metal layer. A pore is constituted between the polymer layers of every the two electrochemical cells. A cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore.