Integrated Electrochromic Layer Deposition for Low Defectivity

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Solution Overview

Problem

Electrochromic devices suffer from high levels of defectivity, such as pinholes and spots, which impair electrochromic transitions and are unacceptable for applications like architectural glass, causing distractions and reducing performance.

Innovation Solution

A single integrated deposition system is used to deposit electrochromic device layers, including an electrochromic layer, an ion conducting layer, and a counter electrode layer, within a controlled ambient environment to minimize exposure to external particles and ensure low defectivity, with each layer being vapor deposited without leaving the system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If electrochromic devices are fabricated using conventional multi-step deposition processes with exposure to external environment, then manufacturing flexibility is improved, but defectivity increases due to particle contamination

Engineering Contradiction:

ImprovedefectivityVSAvoiddeposition system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple deposition steps (electrochromic layer, ion conducting layer, counter electrode layer) into a single integrated deposition system, eliminating intermediate exposures to the external environment that cause particle contamination. This merging of processes directly reduces defectivity while the modular design of the integrated system manages the complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent employs a controlled ambient environment within the integrated deposition system that maintains low particle contamination levels throughout the entire fabrication process. This controlled inert environment prevents external particles from contaminating the device layers, directly addressing the defectivity issue.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

2Reliability

If substrate leaves the deposition system between layers, then process monitoring and adjustment are improved, but particle contamination increases from external exposure

Engineering Contradiction:

Improvedevice reliabilityVSAvoidparticle contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent implements continuous deposition of all device layers without interrupting the substrate's presence in the controlled environment. The substrate remains in the deposition system throughout the entire multi-layer fabrication process, eliminating exposure to external particles and ensuring device reliability through continuous protected operation.

Inventive Principle:

Principle #20Continuity of useful action

3Productivity

If multiple separate deposition systems are used for different layers, then process optimization for each layer is improved, but manufacturing time and handling increase

Engineering Contradiction:

Improvefabrication efficiencyVSAvoidhandling time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The patent merges multiple separate deposition systems into a single integrated deposition system that can deposit different layers (electrochromic, ion conducting, counter electrode) in sequence without removing the substrate. This eliminates handling time and intermediate exposures, directly improving fabrication efficiency while maintaining the ability to optimize each layer's deposition parameters.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in highly reliable electrochromic devices with reduced defects, enabling smooth optical state transitions and improved performance for applications like architectural glass, reducing distractions and maintaining functionality over extended periods.

Implementation Method 1

In some embodiments, the layers of interest are deposited using physical vapor deposition.

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS11947232B2Fabrication of low defectivity electrochromic devices

Publication Date: 2024.04.02 VIEW OPERATING CORP

AI summary

Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition.