Electrochromic Mask Plate for TFT-LCD UV Lithography
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Solution Overview
Problem
The existing UV masks used in TFT-LCD manufacturing are cumbersome and costly due to the need for multiple sizes, leading to increased production time, waste, and storage requirements, as they are easily damaged and disposable.
Innovation Solution
A recyclable and versatile mask plate is developed with a transparent substrate, TFT array, electrochromic layer, and transparent electrodes that can be selectively powered to form various light-shielding patterns, reducing the need for multiple masks by using an electrochromic principle and specific electrode arrangements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple UV masks with different sizes are manufactured for different display panels, then the light-shielding function is improved, but the device complexity and storage requirements increase
Solution Approach 1:
The patent implements a single UV mask plate that can serve multiple functions by dynamically adjusting its light-shielding pattern. The mask plate uses an electrochromic layer that can change its optical properties when voltage is applied, allowing one mask plate to replace multiple fixed-size masks. This universal design enables the same hardware to adapt to different display panel sizes and patterns without requiring physical replacement or additional storage space.
Solution Approach 2:
The patent employs dynamic control of the light-shielding pattern through voltage application to the electrochromic layer. By dynamically changing the electrical state of the electrochromic material, the mask plate can transition between different light-shielding configurations. This dynamic capability allows a single static physical mask plate to perform the function of multiple fixed masks, resolving the contradiction between versatility and device complexity.
2Manufacturing precision
If UV masks are manually replaced for different display panel sizes, then the light-shielding accuracy is improved, but the production time is increased
Solution Approach 1:
The patent pre-configures the mask plate with electrode patterns and electrochromic material arrangements that can generate various light-shielding patterns. Instead of manually replacing masks during production, the system prepares multiple programmable patterns in advance within a single mask plate. This preliminary configuration allows rapid switching between patterns through electrical control, eliminating manual replacement time while maintaining precision.
Solution Approach 2:
The patent replaces the mechanical system of manually handling and replacing physical masks with an electrical control system. The electrochromic layer responds to voltage signals to change its optical properties, substituting mechanical mask replacement with electrical pattern switching. This substitution dramatically reduces production time while maintaining light-shielding accuracy, as electrical switching is much faster than manual operations.
3Stability of the object's composition
If UV masks are fixed through suction attachment, then the mask stability is improved, but the mask reliability deteriorates due to damage to the light-shielding layer
Solution Approach 1:
The patent replaces the mechanical suction attachment system with an integrated electrochromic control system. Instead of relying on mechanical forces that can damage the light-shielding layer, the mask plate uses electrical fields to control the electrochromic layer's optical properties. This eliminates the mechanical attachment step that causes damage, improving reliability while maintaining stability through electrical control mechanisms.
4Adaptability or versatility
If a large number of UV masks with different types are stored, then the adaptability is improved, but the storage space requirement increases
Solution Approach 1:
The patent creates a universal mask plate that can perform the function of multiple specialized masks through dynamic pattern control. Instead of storing numerous physical masks of different types, the system stores a single mask plate with programmable electrochromic patterns. This universal design eliminates the need for extensive storage space while maintaining full adaptability to different display panel requirements.
Solution Approach 2:
The patent enables the mask plate to discard one light-shielding pattern and recover/transform into another pattern through electrical control. Instead of permanently storing multiple fixed masks, the system can switch between patterns on demand. This pattern recovery capability allows the same physical substrate to serve multiple purposes sequentially, eliminating the need for parallel storage of multiple mask types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for efficient use of the mask plate across different display panel sizes without replacement, reducing production time and costs, and minimizing storage needs by enabling customizable light-shielding patterns through voltage control.
Implementation Method 1
an electrochromic layer and a second transparent electrode sequentially arranged on the first transparent substrate. The first transparent electrode is configured to be selectively powered so as to form energized regions with different shapes. Through the mask plate, it is able to control voltages applied to the first transparent electrode and the second transparent electrode, so as to form corresponding light-shielding patterns.
Data Source
AI summary
A mask plate is provided. The mask plate includes a first transparent substrate. A first transparent electrode, an electrochromic layer and a second transparent electrode are arranged sequentially on the first transparent substrate. The first transparent electrode is configured to be selectively powered so as to form energized regions with different shapes. A method for manufacturing the mask plate, a device including the mask plate, and a method for using the mask plate are further provided.