Electrode Collar Cooling Channels for EUV Radiation Sources
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Solution Overview
Problem
Current gas discharge-based short-wavelength radiation sources for semiconductor lithography face challenges with high production costs, complexity, and limited efficiency due to complex cooling mechanisms, which hinder the development of cost-effective and long-lasting electrode components for generating extreme ultraviolet (EUV) radiation.
Innovation Solution
The implementation of a gas discharge arrangement with coaxial electrode housings featuring integrated cooling channels that are advanced radially close to the electrode surfaces, with necked-down channel portions and enhanced surface structures for increased coolant flow rate and heat transfer, utilizing materials like copper, aluminum, or metal ceramics for efficient cooling without increasing electrode size or coolant volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If complex cooling mechanisms (heat pipe arrangements, porous material, capillary structures) are used to cool electrodes, then electrode cooling efficiency is improved, but production costs and device complexity increase significantly
Solution Approach 1:
The patent changes the geometric parameters of the cooling channels by introducing necked-down portions with varying cross-sections along the channel length. This parameter variation optimizes coolant flow distribution and heat transfer efficiency without requiring complex heat pipe arrangements, porous materials, or capillary structures, thereby resolving the contradiction between cooling efficiency and device complexity
Solution Approach 2:
The cooling channels are segmented into different sections with distinct cross-sectional characteristics - wider inlet/outlet regions and necked-down intermediate portions. This segmentation allows optimized coolant flow control in different zones, achieving efficient cooling through simple geometric division rather than complex mechanisms
2Temperature
If cooling channels are positioned close to electrode surfaces to improve cooling, then heat transfer efficiency increases, but electrode structural integrity may be compromised
Solution Approach 1:
The patent applies local quality by positioning cooling channels close to the electrode surface only in specific high-heat-generation zones, while maintaining adequate material thickness in other areas. The necked-down channel portions are strategically located to maximize cooling where needed without compromising overall electrode structural integrity
3Device complexity
If simple cooling channels with ribs are used in electrode bodies, then device complexity is reduced, but cooling efficiency and electrode lifetime are insufficient
Solution Approach 1:
The patent introduces dynamic flow optimization by varying the cooling channel cross-section along its length with necked-down portions. This dynamic geometric variation enhances coolant velocity and heat transfer coefficient in critical zones, significantly improving cooling efficiency and electrode lifetime while maintaining relative structural simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables continuous high-energy supply to the discharge unit with reduced electrode erosion, extending the lifetime of the electrodes and achieving efficient cooling at lower costs, thus enhancing the performance and longevity of EUV radiation sources.
Implementation Method 1
special cooling channels for circulating coolant being integrated in the electrode material in the electrode collars
Implementation Method 2
circulating coolant being circulated through the cooling channels
Implementation Method 3
generation of short-wavelength radiation based on a hot plasma generated through gas discharge
Implementation Method 4
region around the outlet opening of the first electrode housing in which a gas discharge with a plasma generates short-wavelength radiation
Data Source
AI summary
The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.