Two-Piece Electrode Gap Assembly for Selective Plasma Transmission

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Solution Overview

Problem

Plasma processing systems face challenges in maintaining the longevity and effectiveness of components due to degradation from highly energetic and corrosive plasma species, and in controlling the presence of charged species to optimize wafer processing.

Innovation Solution

A two-piece electrode assembly with adjustable couplers and apertures that allows neutral species to pass through while preventing ionized species and free electrons from reaching downstream regions, using a gap distance and lateral separation to control plasma transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single electrode with apertures is used, then the structure is simpler, but it cannot effectively control the transmission of charged species through misalignment

Engineering Contradiction:

Improveplasma species controlVSAvoidelectrode assembly structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The electrode assembly is divided into two separate electrodes (first electrode and second electrode), each with its own set of apertures. This segmentation allows independent positioning and alignment control of each electrode, enabling effective blocking of charged species while maintaining a manageable structure through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A gap is introduced between the first and second electrodes as an intermediary space. This gap, combined with the misalignment of apertures between the two electrodes, creates an effective barrier that prevents charged species from passing through while allowing neutral species to diffuse across, achieving species control without requiring complex single-electrode designs.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If electrodes are fixed in position, then the assembly is more stable, but in-situ adjustments for optimization are not possible

Engineering Contradiction:

Improveplasma processing optimizationVSAvoidadjustable coupler mechanism

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The adjustable coupler mechanism enables dynamic adjustment of the gap distance between the first and second electrodes during or between processing cycles. This dynamic capability allows optimization of plasma species control for different processing requirements while maintaining operational stability through controlled positioning.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system allows changing the gap distance parameter between electrodes to optimize plasma processing outcomes. By adjusting this physical parameter, the transmission characteristics of charged versus neutral species can be tuned for different processing applications, providing versatility without requiring complete redesign of the electrode assembly.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the gap distance is large, then neutral species can pass through easily, but charged species can also penetrate through

Engineering Contradiction:

Improvecharged species blockingVSAvoidgap distance

Core Design Contradiction:

ReliabilityVSLength of moving object

Solution Approach 1:

The aperture misalignment creates localized blocking regions where charged species are prevented from passing through the gap. While the overall gap distance remains sufficient to allow neutral species passage, the specific geometric configuration at each aperture interface creates local barriers that selectively block charged species based on their trajectory and interaction with the electrode surfaces.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the longevity of plasma processing system components, improves process control by selectively allowing or inhibiting charged species, and allows for in-situ adjustments to optimize plasma processing without replacing electrodes.

Implementation Method 1

using a gap distance and lateral separation to control plasma transmission

Methodology Applied

Scientific EffectPhysical separation and gap distance control:

Data Source

PatentUS11915911B2Two piece electrode assembly with gap for plasma control

Publication Date: 2024.02.27 APPLIED MATERIALS INC

AI summary

An apparatus for distributing plasma products includes first and second electrodes that each include planar surfaces. The first electrode forms first apertures from a first planar surface to a second planar surface; the second electrode forms second apertures from the third planar surface to the fourth planar surface. The electrodes couple through one or more adjustable couplers such that the third planar surface is disposed adjacent to the second planar surface with a gap therebetween, the gap having a gap distance. Each of the adjustable couplers has a range of adjustment. The first and second apertures are arranged such that for at least one position within the ranges of adjustment, none of the first apertures aligns with any of the second apertures to form an open straight-line path extending through both the first and second electrodes.