Semiconductor Electrode Nitride Barrier Against Solder Infiltration
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Solution Overview
Problem
Existing semiconductor devices lack a triple point structure where the end portions of the protective film, plated layer, and emitter electrode overlap, leading to potential solder infiltration and reliability issues.
Innovation Solution
Incorporating a nitride film continuously between the protective film and the emitter electrode, and between the non-superposed portion of the plated layer and the emitter electrode, to prevent solder infiltration and eliminate the triple point.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional structure without a triple point is used, then the manufacturing process is simpler, but solder infiltration occurs and reliability deteriorates
Solution Approach 1:
An intermediate layer is introduced between the organic protective film and the aluminum electrode. This intermediate layer acts as a barrier that prevents solder infiltration to the aluminum electrode while maintaining the overall structure. The intermediate layer is positioned at the triple point region where the protective film, plated layer, and emitter electrode meet, blocking the infiltration path of solder without requiring fundamental changes to the existing layered structure.
2Object-affected harmful factors
If the protective film and plated layer are arranged without overlap, then solder infiltration is prevented, but the manufacturing precision requirements increase
Solution Approach 1:
The intermediate layer serves as a buffer and barrier layer between the protective film and the aluminum electrode. Even when the protective film and plated layer overlap during manufacturing variations, the intermediate layer prevents solder from reaching the aluminum electrode. This relaxes the manufacturing precision requirements by providing a tolerance buffer zone that accommodates alignment variations without compromising reliability.
3Object-affected harmful factors
If an intermediate layer is added between the protective film and emitter electrode, then solder infiltration is prevented, but the device complexity increases
Solution Approach 1:
The protective film structure is segmented into multiple functional layers: the organic protective film layer and an additional intermediate layer. This segmentation allows each layer to perform its specific function - the protective film provides general protection while the intermediate layer specifically blocks solder infiltration paths. The segmentation approach prevents solder infiltration by creating a multi-barrier structure without requiring complete redesign of the device architecture.
4Stability of the object's composition
If the triple point structure is eliminated, then crack progression is prevented, but the manufacturing process becomes more complex
Solution Approach 1:
The intermediate layer is strategically positioned at the triple point where the protective film, plated layer, and emitter electrode converge. This intermediate layer eliminates the exposed triple point structure that is prone to crack initiation and propagation. By filling and blocking this vulnerable region, the intermediate layer prevents crack progression while maintaining compatibility with existing manufacturing processes, as it can be deposited using standard thin-film techniques.
Data Source
AI summary
Provided is a semiconductor device comprising: a semiconductor substrate having an upper surface; a first electrode that is provided on or above the upper surface of the semiconductor substrate; a protective film that is provided on or above the first electrode; a plated layer that is provided on or above the first electrode and has a non-superposed portion that is not overlapped with the protective film in a top view; and a nitride film that is continuously provided from a part between the protective film and the first electrode and a part between the non-superposed portion and the first electrode, wherein a thickness of the plated layer that is positioned upper than the nitride film is greater than a thickness of the nitride film.


