Semiconductor Electrode Nitride Barrier Against Solder Infiltration

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Solution Overview

Problem

Existing semiconductor devices lack a triple point structure where the end portions of the protective film, plated layer, and emitter electrode overlap, leading to potential solder infiltration and reliability issues.

Innovation Solution

Incorporating a nitride film continuously between the protective film and the emitter electrode, and between the non-superposed portion of the plated layer and the emitter electrode, to prevent solder infiltration and eliminate the triple point.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional structure without a triple point is used, then the manufacturing process is simpler, but solder infiltration occurs and reliability deteriorates

Engineering Contradiction:
Improvedevice reliabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An intermediate layer is introduced between the organic protective film and the aluminum electrode. This intermediate layer acts as a barrier that prevents solder infiltration to the aluminum electrode while maintaining the overall structure. The intermediate layer is positioned at the triple point region where the protective film, plated layer, and emitter electrode meet, blocking the infiltration path of solder without requiring fundamental changes to the existing layered structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If the protective film and plated layer are arranged without overlap, then solder infiltration is prevented, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvesolder infiltrationVSAvoidalignment precision
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The intermediate layer serves as a buffer and barrier layer between the protective film and the aluminum electrode. Even when the protective film and plated layer overlap during manufacturing variations, the intermediate layer prevents solder from reaching the aluminum electrode. This relaxes the manufacturing precision requirements by providing a tolerance buffer zone that accommodates alignment variations without compromising reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If an intermediate layer is added between the protective film and emitter electrode, then solder infiltration is prevented, but the device complexity increases

Engineering Contradiction:
Improvesolder infiltrationVSAvoidlayer structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The protective film structure is segmented into multiple functional layers: the organic protective film layer and an additional intermediate layer. This segmentation allows each layer to perform its specific function - the protective film provides general protection while the intermediate layer specifically blocks solder infiltration paths. The segmentation approach prevents solder infiltration by creating a multi-barrier structure without requiring complete redesign of the device architecture.

Inventive Principle:
Principle #1Segmentation

4Stability of the object's composition

If the triple point structure is eliminated, then crack progression is prevented, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvestructural stabilityVSAvoidmanufacturing ease
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The intermediate layer is strategically positioned at the triple point where the protective film, plated layer, and emitter electrode converge. This intermediate layer eliminates the exposed triple point structure that is prone to crack initiation and propagation. By filling and blocking this vulnerable region, the intermediate layer prevents crack progression while maintaining compatibility with existing manufacturing processes, as it can be deposited using standard thin-film techniques.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS20250142937A1Semiconductor device and manufacturing method of semiconductor device
Publication Date: 2025.05.01 FUJI ELECTRIC CO LTD
  • US20250142937A1 patent drawing
  • US20250142937A1 patent drawing
  • US20250142937A1 patent drawing

AI summary

Provided is a semiconductor device comprising: a semiconductor substrate having an upper surface; a first electrode that is provided on or above the upper surface of the semiconductor substrate; a protective film that is provided on or above the first electrode; a plated layer that is provided on or above the first electrode and has a non-superposed portion that is not overlapped with the protective film in a top view; and a nitride film that is continuously provided from a part between the protective film and the first electrode and a part between the non-superposed portion and the first electrode, wherein a thickness of the plated layer that is positioned upper than the nitride film is greater than a thickness of the nitride film.