Electrode Pad Width Variation for Contact Hole Coverage
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Solution Overview
Problem
Existing display devices lack structural stability and manufacturing yield, particularly due to issues with contact holes and electrode pads during the manufacturing process.
Innovation Solution
The display device incorporates a specific design where the electrode pad partially covers a first contact hole, with a width relationship represented by Formula 1, and a passivation layer with a second contact hole that overlaps the first, enhancing structural stability and manufacturing yield by reducing peeling-off issues during the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the electrode pad is designed with a specific width relationship to cover the contact hole, then the structural stability is improved, but the device complexity increases
Solution Approach 1:
The electrode pad is designed with non-uniform width, being wider at the first end than at the second end. This local variation in geometry allows the pad to effectively cover the contact hole and prevent peeling-off at the critical first end, while maintaining simpler dimensions at other areas. The localized structural adjustment resolves the contradiction by providing enhanced stability only where needed rather than increasing overall device complexity.
2Productivity
If the electrode pad covers the contact hole to prevent peeling-off, then the manufacturing yield is improved, but the manufacturing precision requirements increase
Solution Approach 1:
The design specifies a quantitative relationship between the electrode pad width and contact hole dimensions, where the pad width at the first end is greater than at the second end. This parameter change creates a built-in tolerance buffer that accommodates manufacturing variations. The gradual width transition provides a margin of error, allowing standard manufacturing processes to achieve reliable coverage without requiring ultra-precise alignment, thus improving yield while managing precision requirements.
Data Source
AI summary
A display device is provided. The display device includes a first substrate, a second substrate, a display layer, an active element layer, and a planar layer disposed on the active element layer. The planar layer includes a first contact hole. The display device further includes an electrode pad disposed on the planar layer. The display device further includes a passivation layer disposed on the electrode pad and the planar layer. The passivation layer includes a second contact hole. The first contact hole partially overlaps the second contact hole. The second contact hole has a projection on the planar layer and on the active element layer located at the bottom of the first contact hole, and the greatest width of the projection is at a first axis. The width of the electrode pad perpendicular to the first axis has a specific width change.