Electrode Pillar Stability via Asymmetric Cross-Section Design
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Solution Overview
Problem
The challenge is to increase capacitance density in semiconductor substrates while maintaining mechanical stability of high-aspect-ratio pillars to prevent breaking or toppling during handling and processing, without requiring additional costly manufacturing steps.
Innovation Solution
The pillars are designed with a tripod-like cross-section, featuring protrusions forming 120-degree angles, which provides mechanical stability and anchoring without the need for auxiliary support structures, allowing for increased length or reduced cross-sectional dimensions without compromising strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the aspect ratio of the pillar is increased to increase capacitance density, then the capacitance per unit substrate area is improved, but the mechanical stability of the pillar deteriorates, making it susceptible to breaking and toppling
Solution Approach 1:
The patent applies asymmetry by changing the pillar cross-section from a conventional symmetric shape to an asymmetric profile with a flat bottom and inclined sidewalls at specific angles (e.g., 60-80 degrees). This asymmetric geometry provides enhanced mechanical stability and resistance to shear forces while maintaining the high aspect ratio needed for increased capacitance density.
Solution Approach 2:
The patent changes the geometric parameters of the pillar, specifically the cross-sectional shape and sidewall angles, to optimize both mechanical stability and capacitance density. By controlling the aspect ratio and cross-sectional dimensions within specific ranges, the pillar achieves improved mechanical properties without sacrificing electrical performance.
2Quantity of substance
If the cross-sectional dimensions of the pillar are decreased to increase capacitance density, then more pillars can be packed together, but the mechanical stability of the pillar deteriorates
Solution Approach 1:
The asymmetric cross-sectional design with a flat bottom and inclined sidewalls provides structural reinforcement that compensates for the reduced cross-sectional dimensions. This geometry distributes mechanical stresses more effectively, allowing smaller pillars to maintain adequate mechanical stability while increasing the number of pillars per unit area.
Solution Approach 2:
The patent optimizes the cross-sectional dimensions and shape parameters to achieve a balance between mechanical strength and capacitance density. By controlling the width, height, and sidewall angles within specific ranges, the design enables smaller pillars to withstand processing and handling forces.
3Strength
If additional support structures are added to stabilize the pillar, then the mechanical stability is improved, but the manufacturing complexity and cost increase
Solution Approach 1:
The patent extracts the need for additional support structures by incorporating mechanical stability directly into the pillar geometry itself. The asymmetric cross-section with inclined sidewalls provides inherent structural reinforcement, eliminating the requirement for separate braces or support elements and simplifying the manufacturing process.
Solution Approach 2:
The pillar structure serves multiple functions simultaneously: it provides electrical connectivity, stores charge, and maintains mechanical stability all through its geometric design. The asymmetric cross-section integrates structural support functionality into the electrode itself, eliminating the need for dedicated support components.
Data Source
Figure 1A~1B
Figure 2A~2F
Figure 2G~2J
AI summary
The invention relates to an electric device including an electric element, the electric element comprising a first electrode (104) having a first surface (106) and a pillar (108), the pillar extending from the first surface in a first direction (110), the pillar having a length measured from the first surface parallel to the first direction, the pillar having a cross section (116) perpendicular to the first direction and the pillar having a sidewall surface (120) enclosing the pillar and extending in the first direction, characterized in -that, the pillar comprises any one of a score (124) and protrusion (122) extending along at least part of the length of the pillar for giving the pillar (108) improved mechanical stability. The electrode allows electrical elements such as capacitors, energy storage devices or diodes to be made with improved properties in a cost effective way.