Upper Electrode Temperature Sensing Under Plasma Discharge Noise
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Solution Overview
Problem
Conventional plasma processing apparatuses face challenges in accurately measuring the temperature of the upper electrode due to plasma discharge noise, especially at high power levels, leading to unstable and inaccurate temperature readings.
Innovation Solution
Incorporating a high capacitance first sheet member with a relative dielectric constant of 2.4 or higher between the upper electrode and the temperature sensor, and a similar second sheet member between the ground electrode and its sensor, to suppress plasma discharge and high-frequency current noise, thereby stabilizing the measurement environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is provided in the upper electrode to measure temperature, then temperature measurement capability is improved, but measurement precision deteriorates due to plasma discharge noise
Solution Approach 1:
A sheet member with high relative dielectric constant (2.4 or higher at 1 MHz) is positioned between the upper electrode and the temperature sensor to act as an intermediary. This sheet member suppresses plasma discharge noise and high-frequency current interference, allowing the temperature sensor to accurately measure the temperature of the upper electrode without being affected by plasma discharge noise.
2Productivity
If high power plasma processing is performed, then productivity is improved, but measurement precision deteriorates due to increased noise interference
Solution Approach 1:
The sheet member with high relative dielectric constant serves as a noise shield between the upper electrode and the temperature sensor. When high power plasma processing is performed, this sheet member effectively blocks the increased plasma discharge noise and high-frequency current interference, maintaining stable and accurate temperature readings even at high processing powers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the accuracy of temperature measurement for the upper electrode and ground electrode by reducing noise interference, maintaining stable readings even during high-power plasma processing.
Implementation Method 1
a first sheet member, disposed between the upper electrode and the first sensor, having a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz
Data Source
AI summary
A plasma processing apparatus includes a processing chamber; a placing table disposed in the processing chamber to place a substrate thereon; an upper electrode facing the placing table; a member configured to adjust a temperature of the upper electrode; a first sensor provided within the member configured to adjust the temperature of the upper electrode, and configured to measure the temperature of the upper electrode; and a first sheet member, disposed between the upper electrode and the first sensor, having a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz.