Electrode Terminal Insulation for Semiconductor Manufacturing
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Solution Overview
Problem
In semiconductor manufacturing apparatuses, the increasing power requirements lead to higher withstand voltage demands across metal base members and electrode terminals, but insulation breakdown occurs due to insufficient coverage by insulating sleeves, resulting in inadequate voltage withstand.
Innovation Solution
The apparatus incorporates a ceramic substrate with a metal base member, an insulating sleeve, a flexible insulating tube covering the cable, and an insulating resin member to enhance voltage withstand, with the tube and cable designed to deflect independently and the resin covering exposed terminal parts, using a heat shrinking tube for secure fixation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If higher power is used in semiconductor manufacturing processes, then processing capability is improved, but withstand voltage requirements increase leading to insulation breakdown
Solution Approach 1:
The patent implements a nested insulation structure where the insulating tube is inserted into the through hole of the base member, the insulating sleeve is fitted onto the electrode terminal, and the insulating resin member fills the remaining space. This multi-layer nested arrangement creates comprehensive insulation coverage that can withstand higher voltages while maintaining compact dimensions.
Solution Approach 2:
The patent employs composite insulation materials including the insulating tube (first insulating material), insulating sleeve (second insulating material), and insulating resin member (third insulating material). Each material is selected for specific properties, and their combination creates a composite insulation system that achieves the required withstand voltage for high-power processing while maintaining reliability.
2Reliability
If the insulating sleeve is extended to reach the insulating resin member, then insulation coverage is improved, but device complexity increases
Solution Approach 1:
The patent divides the insulation system into three distinct segments: the insulating tube forming the outer structure in the through hole, the insulating sleeve covering the electrode terminal, and the insulating resin member filling the间隙 between them. This segmentation allows each component to be manufactured and assembled independently, simplifying the overall structure while achieving complete insulation coverage.
Solution Approach 2:
The insulating resin member acts as an intermediary element that fills the space between the insulating tube and insulating sleeve. This intermediary component completes the insulation coverage without requiring the insulating sleeve to extend the full length to the resin member, thereby reducing structural complexity while maintaining reliability.
3Adaptability or versatility
If the insulating tube and cable are allowed to deflect independently, then flexibility is improved, but pressure on the electrode terminal increases
Solution Approach 1:
The patent employs the insulating tube as a flexible shell that can deflect independently from the cable. The tube's flexible structure allows it to accommodate movements and deflections without transmitting excessive force to the electrode terminal, while still maintaining its insulation function. This flexible shell design provides adaptability while controlling the pressure on the terminal.
Data Source
AI summary
A semiconductor manufacturing apparatus includes: a metal base member fixed to a surface, on the opposite side of a wafer mounting surface, of an electrostatic chuck; an electrode terminal connected to an electrode embedded in the electrostatic chuck; a through hole provided at a position of the base member, the position being opposed to the electrode terminal; an insulating sleeve fixed to the inner circumferential surface of the through hole; a chuck-side terminal which is connected to the electrode terminal via a flexible cable, and fixed to the insulating sleeve with arranged in the insulating sleeve; a flexible insulating tube that covers the cable, the flexible insulating tube having one end fixed to the electrode terminal and the other end fixed to the chuck-side terminal; and an insulating resin member that covers at least part of the electrode terminal, the part being not covered by the insulating tube.