Electroformed Fine Metal Mask for OLED Production

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Solution Overview

Problem

The existing fine metal masks (FFM) used in OLED production are prone to damage and positional inaccuracies due to their limited ductility and low thickness, requiring costly laser welding and frequent replacement, which increases production costs and complexity.

Innovation Solution

A new type of fine metal mask (FMM) is electroformed onto a frame with an integrated structure, eliminating the need for laser welding and reducing the risk of damage from uneven forces and thermal effects, using materials like nickel, molybdenum, or ferronickel alloys with low thermal expansion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If FFM is made thinner to reduce weight and cost, then material cost decreases, but structural strength and positional accuracy deteriorate

Engineering Contradiction:
Improvematerial costVSAvoidstructural strength
Core Design Contradiction:
Quantity of substanceVSStrength

Solution Approach 1:

The patent uses a composite structure combining FFM (thin metal mask) with a supporting frame made of different material properties. The frame provides mechanical strength while the thin FFM layer maintains the required functionality, achieving both low material cost and sufficient structural strength through material composition.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent divides the FFM structure into separate functional components: the thin FFM layer for pattern definition and the separate frame structure for mechanical support. This segmentation allows each component to be optimized independently - the FFM can be extremely thin and lightweight while the frame provides the necessary strength.

Inventive Principle:
Principle #1Segmentation

2Strength

If laser welding is used to attach FFM to frame, then assembly strength improves, but thermal effects and uneven forces cause damage or shifting

Engineering Contradiction:
Improveassembly strengthVSAvoidthermal effects and uneven forces
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the laser welding process (thermal-mechanical process) with a mechanical attachment method using adhesive or mechanical fasteners. This substitution eliminates the thermal effects and uneven forces associated with laser welding, preventing damage or shifting of the thin FFM while maintaining adequate assembly strength.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If FFM is cleaned regularly to avoid pattern deficiency, then pattern quality improves, but damage risk increases and replacement frequency increases

Engineering Contradiction:
Improvepattern qualityVSAvoiddamage risk and service life
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent accepts that the thin FFM has limited service life and implements a replacement strategy rather than a maintenance strategy. The FFM is designed to be replaced every two months before damage occurs, avoiding the need for risky cleaning operations while ensuring continuous pattern quality through timely replacement.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

4Quantity of substance

If FFM thickness is reduced to 30-200 μm, then material cost and weight decrease, but ductility and attachment capability deteriorate

Engineering Contradiction:
Improvematerial costVSAvoidattachment capability
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent separates the FFM (thin metal mask) from the supporting structure (frame). This segmentation allows the FFM to be extremely thin (30-200 μm) for low cost and weight, while the separate frame provides the mechanical attachment capability and structural support that would be insufficient in a single integrated component.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated FMM structure enhances strength, simplifies production, reduces costs, and improves positional accuracy, making the process more reliable and cost-effective by eliminating the need for frequent replacements.

Implementation Method 1

The fine metal mask is electroformed to the surface of the frame

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Data Source

PatentUS9188856B2Type of fine metal mask (FFM) used in OLED production and the method of manufacturing it
Publication Date: 2015.11.17 ZHONGSHAN SYNJOZ MICRO NANO TECHNOLOGY CO LTD
  • US9188856B2 patent drawing
  • US9188856B2 patent drawing
  • US9188856B2 patent drawing

AI summary

A new type of fine metal mask (FMM) used in OLED production and the method of manufacturing it, wherein the FMM includes a frame made of a metal substrate with a plurality of through holes, a layer of fine mask electroformed on the surface of the frame so that said fine mask and said frame are seamlessly integrated, said fine mask is divided into a pattern area and a border area, and the pattern area corresponds to the through holes on the frame, and the method of manufacturing such an FMM comprising the steps of: A. providing a metal substrate by cutting an invar alloy or stainless steel plate to a desired size; B. providing an fine mask by adding a photoresist layer on the metal substrate, exposing a desired pattern onto said photoresist layer, and electroforming a metal base layer and a metal layer with a low thermal expansion coefficient; and C. etching the metal substrate by etching out a pattern area of the metal substrate that corresponds to the pattern area of said fine mask using a chemical etching method to form a plurality of through holes, and creating an outer border area and internal separation area for support of said fine mask.