Electroless Atomic Layer Deposition for Scalable Noble Metal Coating

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Solution Overview

Problem

Existing atomic layer deposition techniques face challenges such as limited material range, requirement of elevated temperatures, substrate damage, and scalability issues due to the need for large electrical current sources, especially when dealing with large surface areas and noble metals like Palladium for applications in hydrogen storage and sensing.

Innovation Solution

The method of electroless atomic layer deposition, which generates a sacrificial material layer without external electrical power, using a galvanic exchange reaction to deposit a second material, allowing for controlled growth of layers at room temperature and scalability without the need for electrical contact or specialized instrumentation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If electrochemical atomic layer deposition is used to deposit materials on large surface area substrates, then the desired material coating is achieved, but large electrical current sources are required which complicates the system and limits scalability

Engineering Contradiction:
Improvesubstrate surface areaVSAvoidelectrical current source requirements
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent replaces the electrochemical method (requiring electrical current sources) with an electroless chemical deposition method. The sacrificial layer is formed through chemical reduction using a reducing agent in solution, eliminating the need for external electrical current sources while maintaining the ability to coat large surface area substrates

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The substrate itself serves as the reaction surface where the electroless deposition occurs spontaneously through chemical reactions between the reducing agent and the metal ions in solution. The process is self-driven by the chemical potential difference between the reducing agent and the metal ions, requiring no external energy input

Inventive Principle:
Principle #25Self-service

2Manufacturing precision

If conventional atomic layer deposition is used to achieve precise atomic thickness control, then manufacturing precision is improved, but elevated temperatures and highly reactive precursors are required which can damage substrates

Engineering Contradiction:
Improveatomic thickness controlVSAvoidsubstrate damage from high temperature and reactive precursors
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent changes the temperature parameter from elevated temperatures (conventional ALD) to room temperature (electroless deposition). This parameter change eliminates thermal damage to substrates while maintaining precise atomic thickness control through the self-limiting nature of the electroless deposition process

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the physical vapor deposition mechanism (requiring high temperatures and reactive precursors) with a wet chemical deposition mechanism. The electroless deposition uses chemical reduction reactions in aqueous solution to deposit metal atoms, eliminating the need for high temperatures and highly reactive gaseous precursors

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If galvanic exchange reaction is used for electroless deposition, then deposition can proceed without external electrical current, but the extent of deposition is limited by corrosion and passivation of the substrate

Engineering Contradiction:
Improvedeposition without external electrical currentVSAvoiddeposition thickness control
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent introduces a sacrificial layer as an intermediary between the substrate and the desired coating material. This sacrificial layer undergoes controlled electroless deposition with precise thickness control, then serves as the target for galvanic exchange reaction, allowing the desired material to deposit without directly interacting with and potentially corroding the substrate

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent performs preliminary electroless deposition of a sacrificial layer before the galvanic exchange reaction. This preliminary action creates a controlled, uniform layer that limits the galvanic exchange to a specific thickness, preventing uncontrolled corrosion of the substrate while enabling easy operation without external electrical current

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the controlled growth of thin films with precise atomic thickness, enhancing the properties of noble metals like Palladium for applications in catalysis and sensing, while being scalable and environmentally friendly.

Implementation Method 1

Electroless deposition is a method that enables thin film growth under mild conditions on substrates to which electrical current is not easily supplied. This method usually involves a second chemical agent that donates or accepts electrons from the species being deposited.

Methodology Applied
Scientific EffectElectroless deposition:

Implementation Method 2

Galvanic exchange, also known as galvanic displacement, galvanic replacement, or redox replacement, is a type of electroless deposition in which the substrate serves as the second chemical agent, typically being oxidized as the desired material is deposited.

Methodology Applied
Scientific EffectGalvanic exchange reaction: Redox Reactions

Data Source

PatentUS9803285B1Electroless atomic layer deposition
Publication Date: 2017.10.31 NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC
  • US9803285B1 patent drawing
  • US9803285B1 patent drawing
  • US9803285B1 patent drawing

AI summary

A method of electroless atomic layer deposition is described. The method electrolessly generates a layer of sacrificial material on a surface of a first material. The method adds doses of a solution of a second material to the substrate. The method performs a galvanic exchange reaction to oxidize away the layer of the sacrificial material and deposit a layer of the second material on the surface of the first material. The method can be repeated for a plurality of iterations in order to deposit a desired thickness of the second material on the surface of the first material.