Electrolytic Treatment Device With Switchable Indirect Electrode

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Solution Overview

Problem

Existing plating treatment methods face inefficiencies due to non-uniform deposition of metallic ions, poor plating rate, and the challenge of suppressing water electrolysis, which leads to voids in the plating metal and requires large-scale stirring mechanisms that may not be feasible in all device configurations.

Innovation Solution

An electrolytic treatment method using a direct electrode, a counter electrode, and an indirect electrode with a switch to control the electric field, allowing for the migration and oxidation/reduction of treatment target ions without simultaneous charge exchange, thereby improving plating rate and uniformity while minimizing water electrolysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the electric field is increased to improve plating rate, then the plating rate is improved, but water electrolysis occurs causing voids in the plating metal

Engineering Contradiction:

Improveplating rateVSAvoidplating quality

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent divides the electrode system into three parts: direct electrode, indirect electrode, and counter electrode. The indirect electrode is introduced to mediate the electric field distribution, segmenting the direct current path and enabling more uniform ion deposition without excessive electric field intensity that causes water electrolysis.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The indirect electrode acts as an intermediary between the direct electrode and counter electrode. It mediates the electric field distribution in the treatment liquid, allowing metallic ions to migrate uniformly toward the counter electrode without requiring high electric field strength that would cause water electrolysis and void formation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If the plating liquid is stirred and circulated to improve plating rate, then the plating rate is improved, but a large-scale stirring mechanism is required which may not be installable

Engineering Contradiction:

Improveplating rateVSAvoidstirring mechanism

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical stirring system with an electric field-based ion migration system. By applying voltage between electrodes, metallic ions are migrated and deposited uniformly without requiring mechanical agitation, thereby eliminating the need for large-scale stirring mechanisms while maintaining high plating rates.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Duration of action of moving object

If current flows continuously between anode and treatment target object, then the treatment process is continuous, but metallic ions are not sufficiently accumulated leading to non-uniform deposition

Engineering Contradiction:

Improvetreatment continuityVSAvoiddeposition uniformity

Core Design Contradiction:

Duration of action of moving objectVSManufacturing precision

Solution Approach 1:

The patent implements periodic voltage application through the switchable indirect electrode system. The indirect electrode is periodically connected and disconnected from the power source, creating periodic electric fields that allow metallic ions to accumulate uniformly on the counter electrode surface before deposition occurs, ensuring uniform plating while maintaining continuous treatment capability.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables efficient and uniform deposition of metallic ions, improving the plating rate and quality by controlling the electric field and reducing the need for large-scale stirring mechanisms, resulting in a more efficient and uniform plating process.

Implementation Method 1

an indirect electrode configured to form an electric field in the treatment liquid

Methodology Applied

Scientific EffectElectric field: Electric Field

Implementation Method 2

migrating the treatment target ions contained in the treatment liquid to the counter electrode, by connecting the indirect electrode with the power source and then applying a voltage using the switch

Methodology Applied

Scientific EffectIon migration: Electrophoresis

Implementation Method 3

oxidizing or reducing the treatment target ions migrated to the counter electrode, by disconnecting the indirect electrode from the power source and connecting the indirect electrode to the direct electrode or the counter electrode using the switch

Methodology Applied

Scientific EffectOxidation: Oxidation

Implementation Method 4

oxidizing or reducing the treatment target ions migrated to the counter electrode

Methodology Applied

Scientific EffectReduction: Reduction

Data Source

PatentUS10294575B2Electric field treatment method and electric field treatment device

Publication Date: 2019.05.21 TOKYO ELECTRON LTD

AI summary

An electrolytic treatment device that performs a prescribed treatment using ions to be treated that are contained in a treatment liquid, and includes a direct electrode and a counter electrode which are arranged on either side of the treatment liquid, an indirect electrode which forms an electric field in the treatment liquid, and a switch which switches between connection of the indirect electrode to the power source and connection of the indirect electrode to the direct electrode or the counter electrode. The switch connects and applies a voltage across the indirect electrode and the power source, and breaks the connection between the indirect electrode and the power source and connects the indirect electrode to the direct electrode or the counter electrode.